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Record Type:	Language materials, printed : monographic
Author:	��A��
Alternative Intellectual Responsibility:	��y��
Alternative Intellectual Responsibility:	�L�ۭ�
Place of Publication:	�_��
Published:	�ƾǤu�~�X��;
Year of Publication:	2004
Series:	��q�@��O��
Subject:	�L�� -
Online resource:	http://cec.lib.apabi.com:80/product.asp?BookID=ISBN7%2d5025%2d5237%2d5
Summary:	�L��q�t��(MEMS,�Y Micro Electro Mechanical System)�O�@��s��e��,�P�L�q�l�ǡB�H��ǡB��Ƭ�ǩM�Ģ̌޳N��o�i��K�l��B�Q��{��21�@��I�o�i�Ǭ�,��췥�j��,�O��a��I�o�i��޳N��~,�o�i�e��ݦn�C
ISBN:	7502552375

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�L��q�t�γ]�p�P�s�y / ��A��, ��y��, �L�ۭ�s�� - �_�� : �ƾǤu�~�X��, 2004. - (��q�@��O��).
ISBN 7502552375
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330 $a �L��q�t��(MEMS,�Y Micro Electro Mechanical System)�O�@��s��e��,�P�L�q�l�ǡB�H��ǡB��Ƭ�ǩM�Ģ̌޳N��o�i��K�l��B�Q��{��21�@��I�o�i�Ǭ�,��췥�j��,�O��a��I�o�i��޳N��~,�o�i�e��ݦn�C
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997 $a ISBN7-5025-5237-5

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