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非晶氫化碳氧化矽薄膜.
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1 works in 1 publications in 1 languages
Titles
利用電漿增強化學氣相沉積法製備氫化碳氧化矽薄膜之研究 = = Study on the Preparation of Hydrogenated Silicon Oxy-Carbon Films Using Plasma-Enhanced Chemical Vapor Deposition /
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Subjects
amorphous hydrogenated silicon carbide films.
electrical characterization.
high temperature annealing furnace.
nanospheres.
PECVD.
porogenic agents.
spin coating method.
surface roughness.
thermal stability.
奈米球.
旋塗塗佈法.
熱穩定性.
致孔劑.
表面粗糙度.
電特性分析.
非晶氫化碳氧化矽薄膜.
高溫退火爐.
高頻電漿增強化學氣相沉積法.
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