Saile, Volker.

Overview

Works:	3 works in 1 publications in 1 languages

Titles

Micro and Nano Fabrication = Tools and Processes / by: Saile, Volker.; Gatzen, Hans H.; Leuthold, Jürg.; SpringerLink (Online service) (Language materials, printed) , [http://id.loc.gov/vocabulary/relators/aut]

Micro and nano fabrication = tools and processes / by: Saile, Volker.; Gatzen, Hans H.; Leuthold, Jurg.; SpringerLink (Online service) (Language materials, printed)

Subjects

Nanotechnology and Microengineering. Manufactures. Manufacturing, Machines, Tools, Processes. Manufacturing, Machines, Tools. Engineering. Operating Procedures, Materials Treatment. Microelectromechanical systems. Nanotechnology.