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Micro and Nano Fabrication = Tools a...
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Micro and Nano Fabrication = Tools and Processes /
紀錄類型:
書目-語言資料,印刷品 : Monograph/item
正題名/作者:
Micro and Nano Fabrication/ by Hans H. Gatzen, Volker Saile, Jürg Leuthold.
其他題名:
Tools and Processes /
作者:
Gatzen, Hans H.
其他作者:
Saile, Volker.
面頁冊數:
XXVI, 519 p. 357 illus., 54 illus. in color.online resource. :
Contained By:
Springer Nature eBook
標題:
Nanotechnology. -
電子資源:
https://doi.org/10.1007/978-3-662-44395-8
ISBN:
9783662443958
Micro and Nano Fabrication = Tools and Processes /
Gatzen, Hans H.
Micro and Nano Fabrication
Tools and Processes /[electronic resource] :by Hans H. Gatzen, Volker Saile, Jürg Leuthold. - 1st ed. 2015. - XXVI, 519 p. 357 illus., 54 illus. in color.online resource.
Introduction-MEMS, a Historical Perspective -- Vacuum Technology -- Deposition Technologies -- Etching Technologies -- Doping and Surface Modification -- Lithography -- LIGA -- Nanofabrication by Self-Assembly -- Enabling Technologies I - Wafer Planarization and Bonding -- Enabling Technologies II - Contamination Control -- Device Fabrication - An Example.
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
ISBN: 9783662443958
Standard No.: 10.1007/978-3-662-44395-8doiSubjects--Topical Terms:
557660
Nanotechnology.
LC Class. No.: T174.7
Dewey Class. No.: 620.5
Micro and Nano Fabrication = Tools and Processes /
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