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郭映琦
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Titles
透過控制鈷和釕的低電位沉積在TiSi2上逐層沉積鈷釕合金薄膜 = = Layer-by-layer deposition of Co(Ru) Films on TiSi2 Substrate by Sequentially Manipulating Underpotential Deposition of Co and Ru /
by: 郭映琦
(Language materials, printed)
Subjects
Co(Ru) alloy thin films.
EC-ALD.
Interconnects.
Underpotential Deposition.
低電位沉積.
半導體互連導線.
鈷釕合金薄膜.
電化學原子層沉積.
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