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Laser Heat-Mode Lithography = Principle and Methods /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Laser Heat-Mode Lithography/ by Jingsong Wei.
其他題名:	Principle and Methods /
作者:	Wei, Jingsong.
面頁冊數:	XIII, 208 p. 182 illus., 160 illus. in color.online resource. :
Contained By:	Springer Nature eBook
標題:	Surfaces (Physics). -
電子資源:	https://doi.org/10.1007/978-981-15-0943-8
ISBN:	9789811509438

Laser Heat-Mode Lithography = Principle and Methods /
Wei, Jingsong.

Laser Heat-Mode LithographyPrinciple and Methods /[electronic resource] :by Jingsong Wei. - 1st ed. 2019. - XIII, 208 p. 182 illus., 160 illus. in color.online resource. - Springer Series in Materials Science,2910933-033X ;. - Springer Series in Materials Science,200.

Current status of lithography -- Principles of laser heat-mode lithography and thermal diffusion -- Laser heat-mode maskless lithography system -- Manipulation of thermal diffusion channels -- Laser heat-mode nanolithography on phase-change thin films -- Direct laser heat-mode nanopatterning on metallo-organic compound thin films -- Laser heat-mode patterning of transparent thin films -- Laser heat-mode grayscale image lithography -- Patterns transfer processes and applications.

This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applications. It introduces laser heat-mode lithography, where the resist thin films are essentially an opto-thermal response to the laser beam with changeable wavelength and are not sensitive to laser wavelength. Laser heat-mode lithography techniques greatly simplify production procedures because they require neither a particular light source nor a particular environment; further, there are no pre-baking and post-baking steps required for organic photoresists. The pattern feature size can be either larger or smaller than the laser spot by adjusting the writing strategy. The lithographic feature size can also be arbitrarily tuned from nanoscale to micrometer without changing the laser spot size. Lastly, the line edge roughness can be controlled at a very low value because the etching process is a process of breaking bonds among atoms. The book offers an invaluable reference guide for all advanced undergraduates, graduate students, researchers and engineers working in the fields of nanofabrication, lithography techniques and systems, phase change materials, etc.

ISBN: 9789811509438

Standard No.: 10.1007/978-981-15-0943-8doiSubjects--Topical Terms:

716359
Surfaces (Physics).

LC Class. No.: QC176.8.S8

Dewey Class. No.: 530.417

Laser Heat-Mode Lithography = Principle and Methods /
LDR:03296nam a22004215i 4500 001 1013390
003 DE-He213
005 20200705025842.0
007 cr nn 008mamaa
008 210106s2019 si | s |||| 0|eng d
020 $a 9789811509438 $9 978-981-15-0943-8
024 7 $a 10.1007/978-981-15-0943-8 $2 doi
035 $a 978-981-15-0943-8
050 4 $a QC176.8.S8
050 4 $a QC611.6.S9
072 7 $a PHFC $2 bicssc
072 7 $a SCI077000 $2 bisacsh
072 7 $a PHFC $2 thema
082 0 4 $a 530.417 $2 23
100 1 $a Wei, Jingsong. $4 aut $4 http://id.loc.gov/vocabulary/relators/aut $3 1063668
245 1 0 $a Laser Heat-Mode Lithography $h [electronic resource] : $b Principle and Methods / $c by Jingsong Wei.
250 $a 1st ed. 2019.
264 1 $a Singapore : $b Springer Singapore : $b Imprint: Springer, $c 2019.
300 $a XIII, 208 p. 182 illus., 160 illus. in color. $b online resource.
336 $a text $b txt $2 rdacontent
337 $a computer $b c $2 rdamedia
338 $a online resource $b cr $2 rdacarrier
347 $a text file $b PDF $2 rda
490 1 $a Springer Series in Materials Science, $x 0933-033X ; $v 291
505 0 $a Current status of lithography -- Principles of laser heat-mode lithography and thermal diffusion -- Laser heat-mode maskless lithography system -- Manipulation of thermal diffusion channels -- Laser heat-mode nanolithography on phase-change thin films -- Direct laser heat-mode nanopatterning on metallo-organic compound thin films -- Laser heat-mode patterning of transparent thin films -- Laser heat-mode grayscale image lithography -- Patterns transfer processes and applications.
520 $a This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applications. It introduces laser heat-mode lithography, where the resist thin films are essentially an opto-thermal response to the laser beam with changeable wavelength and are not sensitive to laser wavelength. Laser heat-mode lithography techniques greatly simplify production procedures because they require neither a particular light source nor a particular environment; further, there are no pre-baking and post-baking steps required for organic photoresists. The pattern feature size can be either larger or smaller than the laser spot by adjusting the writing strategy. The lithographic feature size can also be arbitrarily tuned from nanoscale to micrometer without changing the laser spot size. Lastly, the line edge roughness can be controlled at a very low value because the etching process is a process of breaking bonds among atoms. The book offers an invaluable reference guide for all advanced undergraduates, graduate students, researchers and engineers working in the fields of nanofabrication, lithography techniques and systems, phase change materials, etc.
650 0 $a Surfaces (Physics). $3 716359
650 0 $a Interfaces (Physical sciences). $3 795468
650 0 $a Thin films. $3 560219
650 0 $a Lasers. $3 557748
650 0 $a Photonics. $3 562392
650 0 $a Microwaves. $3 636639
650 0 $a Optical engineering. $3 720802
650 0 $a Optical materials. $3 672695
650 0 $a Electronic materials. $3 1253592
650 1 4 $a Surface and Interface Science, Thin Films. $3 782551
650 2 4 $a Optics, Lasers, Photonics, Optical Devices. $3 1112289
650 2 4 $a Microwaves, RF and Optical Engineering. $3 593918
650 2 4 $a Optical and Electronic Materials. $3 593919
710 2 $a SpringerLink (Online service) $3 593884
773 0 $t Springer Nature eBook
776 0 8 $i Printed edition: $z 9789811509421
776 0 8 $i Printed edition: $z 9789811509445
776 0 8 $i Printed edition: $z 9789811509452
830 0 $a Springer Series in Materials Science, $x 0933-033X ; $v 200 $3 1254755
856 4 0 $u https://doi.org/10.1007/978-981-15-0943-8
912 $a ZDB-2-PHA
912 $a ZDB-2-SXP
950 $a Physics and Astronomy (SpringerNature-11651)
950 $a Physics and Astronomy (R0) (SpringerNature-43715)