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Flash Lamp Annealing = From Basics to Applications /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Flash Lamp Annealing/ by Lars Rebohle, Slawomir Prucnal, Denise Reichel.
其他題名:	From Basics to Applications /
作者:	Rebohle, Lars.
其他作者:	Prucnal, Slawomir.
面頁冊數:	XVIII, 288 p.online resource. :
Contained By:	Springer Nature eBook
標題:	Semiconductors. -
電子資源:	https://doi.org/10.1007/978-3-030-23299-3
ISBN:	9783030232993

Flash Lamp Annealing = From Basics to Applications /
Rebohle, Lars.

Flash Lamp AnnealingFrom Basics to Applications /[electronic resource] :by Lars Rebohle, Slawomir Prucnal, Denise Reichel. - 1st ed. 2019. - XVIII, 288 p.online resource. - Springer Series in Materials Science,2880933-033X ;. - Springer Series in Materials Science,200.

Introduction -- Technological background -- Basic components -- Flash lamps -- Process management and process control -- FLA assisted deposition -- Temperature -- Thermal budget -- Temperature measurements -- Temperature simulations -- FLA for semiconductors -- Defect engineering -- Doping -- Crystallization -- Semiconductor nanostructures -- Beyond semiconductors -- Transparent conducting oxides -- Metallic films -- High-k materials and dielectrics -- Flexible substrates -- Outlook.

This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations. This book is a valuable reference work for both novice and advanced users.

ISBN: 9783030232993

Standard No.: 10.1007/978-3-030-23299-3doiSubjects--Topical Terms:

578843
Semiconductors.

LC Class. No.: QC610.9-611.8

Dewey Class. No.: 537.622

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505 0 $a Introduction -- Technological background -- Basic components -- Flash lamps -- Process management and process control -- FLA assisted deposition -- Temperature -- Thermal budget -- Temperature measurements -- Temperature simulations -- FLA for semiconductors -- Defect engineering -- Doping -- Crystallization -- Semiconductor nanostructures -- Beyond semiconductors -- Transparent conducting oxides -- Metallic films -- High-k materials and dielectrics -- Flexible substrates -- Outlook.
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