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Flash Lamp Annealing = From Basics t...
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Rebohle, Lars.
Flash Lamp Annealing = From Basics to Applications /
紀錄類型:
書目-語言資料,印刷品 : Monograph/item
正題名/作者:
Flash Lamp Annealing/ by Lars Rebohle, Slawomir Prucnal, Denise Reichel.
其他題名:
From Basics to Applications /
作者:
Rebohle, Lars.
其他作者:
Prucnal, Slawomir.
面頁冊數:
XVIII, 288 p.online resource. :
Contained By:
Springer Nature eBook
標題:
Semiconductors. -
電子資源:
https://doi.org/10.1007/978-3-030-23299-3
ISBN:
9783030232993
Flash Lamp Annealing = From Basics to Applications /
Rebohle, Lars.
Flash Lamp Annealing
From Basics to Applications /[electronic resource] :by Lars Rebohle, Slawomir Prucnal, Denise Reichel. - 1st ed. 2019. - XVIII, 288 p.online resource. - Springer Series in Materials Science,2880933-033X ;. - Springer Series in Materials Science,200.
Introduction -- Technological background -- Basic components -- Flash lamps -- Process management and process control -- FLA assisted deposition -- Temperature -- Thermal budget -- Temperature measurements -- Temperature simulations -- FLA for semiconductors -- Defect engineering -- Doping -- Crystallization -- Semiconductor nanostructures -- Beyond semiconductors -- Transparent conducting oxides -- Metallic films -- High-k materials and dielectrics -- Flexible substrates -- Outlook.
This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations. This book is a valuable reference work for both novice and advanced users.
ISBN: 9783030232993
Standard No.: 10.1007/978-3-030-23299-3doiSubjects--Topical Terms:
578843
Semiconductors.
LC Class. No.: QC610.9-611.8
Dewey Class. No.: 537.622
Flash Lamp Annealing = From Basics to Applications /
LDR
:02652nam a22004095i 4500
001
1014858
003
DE-He213
005
20200703144339.0
007
cr nn 008mamaa
008
210106s2019 gw | s |||| 0|eng d
020
$a
9783030232993
$9
978-3-030-23299-3
024
7
$a
10.1007/978-3-030-23299-3
$2
doi
035
$a
978-3-030-23299-3
050
4
$a
QC610.9-611.8
072
7
$a
TJFD5
$2
bicssc
072
7
$a
TEC008090
$2
bisacsh
072
7
$a
TJFD
$2
thema
082
0 4
$a
537.622
$2
23
100
1
$a
Rebohle, Lars.
$4
aut
$4
http://id.loc.gov/vocabulary/relators/aut
$3
1229766
245
1 0
$a
Flash Lamp Annealing
$h
[electronic resource] :
$b
From Basics to Applications /
$c
by Lars Rebohle, Slawomir Prucnal, Denise Reichel.
250
$a
1st ed. 2019.
264
1
$a
Cham :
$b
Springer International Publishing :
$b
Imprint: Springer,
$c
2019.
300
$a
XVIII, 288 p.
$b
online resource.
336
$a
text
$b
txt
$2
rdacontent
337
$a
computer
$b
c
$2
rdamedia
338
$a
online resource
$b
cr
$2
rdacarrier
347
$a
text file
$b
PDF
$2
rda
490
1
$a
Springer Series in Materials Science,
$x
0933-033X ;
$v
288
505
0
$a
Introduction -- Technological background -- Basic components -- Flash lamps -- Process management and process control -- FLA assisted deposition -- Temperature -- Thermal budget -- Temperature measurements -- Temperature simulations -- FLA for semiconductors -- Defect engineering -- Doping -- Crystallization -- Semiconductor nanostructures -- Beyond semiconductors -- Transparent conducting oxides -- Metallic films -- High-k materials and dielectrics -- Flexible substrates -- Outlook.
520
$a
This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations. This book is a valuable reference work for both novice and advanced users.
650
0
$a
Semiconductors.
$3
578843
650
0
$a
Optical materials.
$3
672695
650
0
$a
Electronic materials.
$3
1253592
650
0
$a
Manufactures.
$3
680602
650
0
$a
Lasers.
$3
557748
650
0
$a
Photonics.
$3
562392
650
0
$a
Microwaves.
$3
636639
650
0
$a
Optical engineering.
$3
720802
650
0
$a
Nanotechnology.
$3
557660
650
2 4
$a
Optical and Electronic Materials.
$3
593919
650
2 4
$a
Manufacturing, Machines, Tools, Processes.
$3
1226012
650
2 4
$a
Optics, Lasers, Photonics, Optical Devices.
$3
1112289
650
2 4
$a
Microwaves, RF and Optical Engineering.
$3
593918
650
2 4
$a
Nanotechnology and Microengineering.
$3
722030
700
1
$a
Prucnal, Slawomir.
$4
aut
$4
http://id.loc.gov/vocabulary/relators/aut
$3
1229767
700
1
$a
Reichel, Denise.
$4
aut
$4
http://id.loc.gov/vocabulary/relators/aut
$3
1070605
710
2
$a
SpringerLink (Online service)
$3
593884
773
0
$t
Springer Nature eBook
776
0 8
$i
Printed edition:
$z
9783030232986
776
0 8
$i
Printed edition:
$z
9783030233006
776
0 8
$i
Printed edition:
$z
9783030233013
830
0
$a
Springer Series in Materials Science,
$x
0933-033X ;
$v
200
$3
1254755
856
4 0
$u
https://doi.org/10.1007/978-3-030-23299-3
912
$a
ZDB-2-PHA
912
$a
ZDB-2-SXP
950
$a
Physics and Astronomy (SpringerNature-11651)
950
$a
Physics and Astronomy (R0) (SpringerNature-43715)
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