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Micro and Nano Fabrication Technology

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Micro and Nano Fabrication Technology/ edited by Jiwang Yan.
other author:	Yan, Jiwang.
Description:	XII, 958 p.online resource. :
Contained By:	Springer Nature Living Reference
Subject:	Biomedical Engineering and Bioengineering. -
Online resource:	https://doi.org/10.1007/978-981-10-6588-0
ISBN:	9789811065880

Micro and Nano Fabrication Technology
Micro and Nano Fabrication Technology[electronic resource] /edited by Jiwang Yan. - XII, 958 p.online resource. - Micro/Nano Technologies,12522-5065 ;. - Micro/Nano Technologies,.

Material Physics -- Pattern design and transformation: Lithography -- Process simulation -- Metalization -- Deposition -- Wet etching -- Dry etching -- Assembly and packaging -- Laser micro and nanofabrication -- Nanomachining.

This volume focuses on the state-of-the-art micro/nanofabrication technologies for creating miniature structures with high precision. These multidisciplinary technologies include mechanical, electrical, optical, physical, and chemical methods, as well as hybrid processes, covering subtractive and additive material manufacturing, as well as net-shape manufacturing. The materials the volume deals with include metals, alloys, semiconductors, polymers, crystals, glass, ceramics, composites, and nanomaterials. The volume is composed of 30 chapters, which are grouped into five parts. Engaging with the latest research in the field, these chapters provide important perspectives on key topics, from process developments at the shop level to scientific investigations at the academic level, offering both experimental work and theoretical analysis. Moreover, the content of this volume is highly interdisciplinary in nature, with insights from not only manufacturing technology but also mechanical/mat erial science, optics, physics, chemistry, and more.

ISBN: 9789811065880

Standard No.: 10.1007/978-981-10-6588-0doiSubjects--Topical Terms:

1211019
Biomedical Engineering and Bioengineering.

LC Class. No.: T174.7

Dewey Class. No.: 620.5

Micro and Nano Fabrication Technology
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