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Micro and Nano Machined Electrometers

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Micro and Nano Machined Electrometers/ edited by Yong Zhu.
其他作者:	Zhu, Yong.
面頁冊數:	V, 220 p. 141 illus., 124 illus. in color.online resource. :
Contained By:	Springer Nature eBook
標題:	Nanotechnology and Microengineering. -
電子資源:	https://doi.org/10.1007/978-981-13-3247-0
ISBN:	9789811332470

Micro and Nano Machined Electrometers
Micro and Nano Machined Electrometers[electronic resource] /edited by Yong Zhu. - 1st ed. 2020. - V, 220 p. 141 illus., 124 illus. in color.online resource.

Introduction -- Noises in electrometers -- Commercial solid-state electrometer -- Mesoscopic SET electrometer -- NEMS based resonant electrometer -- MEMS based resonant electrometer -- MEMS based resonant electrometer -- Vibrating-reed electrometer -- Vibrating-reed electrometer -- Electrometer applications.

This book reviews advances in cutting-edge micro-/nano-electrometers, and discusses the technological challenges involved in their practical implementation. The detection of electrostatic charge has a wide range of applications in ionization chambers, bio-analyte and aerosol particle instruments, mass spectrometers, scanning tunneling microscopes, and even quantum computers. Designing micro-/nano-electrometers (also known as charge sensors) for electrometry is considered vital because of the charge sensitivity and resolution issues at micro-/nano-scales. The remarkably dynamic microelectromechanical systems (MEMSs)/nanoelectromechanical systems (NEMSs), and advances in solid-state electronics, hold considerable potential for the design and fabrication of extremely sensitive charge sensors.

ISBN: 9789811332470

Standard No.: 10.1007/978-981-13-3247-0doiSubjects--Topical Terms:

722030
Nanotechnology and Microengineering.

LC Class. No.: TK7888.4

Dewey Class. No.: 621.3815

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