國立虎尾科技大學 |

Micro Electro Mechanical Systems

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Micro Electro Mechanical Systems/ edited by Qing-An Huang.
其他作者:	Huang, Qing-An.
面頁冊數:	online resource. :
Contained By:	Springer Nature Living Reference
標題:	Microwaves, RF and Optical Engineering. -
電子資源:	https://doi.org/10.1007/978-981-10-2798-7
ISBN:	9789811027987

Micro Electro Mechanical Systems
Micro Electro Mechanical Systems[electronic resource] /edited by Qing-An Huang. - online resource. - Micro/Nano Technologies,22522-5065 ;. - Micro/Nano Technologies,.

Device Physics -- Scaling effect -- Sensors -- Actuators -- RF MEMS -- Micro fluid and bio MEMS -- Integration techniques -- Micro systems.

This handbook volume aims to provide a comprehensive, self-contained, and authoritative reference in MEMS. It covers the theoretical and practical aspects including but not limited to sensors, actuators, RF MEMS, micro fluids and bio MEMS systems. It is particularly recommended to undergraduates, postgraduates, researchers, scientists, and field experts. This comprehensive summary will provide a solid knowledge background and inspire innovations in this highly interdisciplinary field. The handbook series consists of 5 volumes: Micro/nano fabrication technology, MEMS, Nanomaterial, Nanomedicine and Applications of micro-/nanotechnologies in IT. Experienced researchers and experts are invited to contribute in each of these areas.The series is published under Springer Major Reference works, which allows continuous online update and publication. These features allow newcomers and other readers to keep in touch with the most up-to-date information in micro-/nanotechnologies.It presents an overview of the knowledge base, as well as selected topics and provides comprehensive and authoritative information on the field for researchers, engineers, scientists and graduate students who are involved in different aspects of micro-/nanotechnologies.This publication will provide inspiration for innovative research and application ideas for continued growth of the field.

ISBN: 9789811027987

Standard No.: 10.1007/978-981-10-2798-7doiSubjects--Topical Terms:

593918
Microwaves, RF and Optical Engineering.

LC Class. No.: T174.7

Dewey Class. No.: 620.5

Micro Electro Mechanical Systems
LDR:02728nam a22003735i 4500 001 1027205
003 DE-He213
005 20200630192931.0
007 cr nn 008mamaa
008 210318s2020 si | s |||| 0|eng d
020 $a 9789811027987 $9 978-981-10-2798-7
024 7 $a 10.1007/978-981-10-2798-7 $2 doi
035 $a 978-981-10-2798-7
050 4 $a T174.7
072 7 $a TDPB $2 bicssc
072 7 $a TEC027000 $2 bisacsh
072 7 $a TDP $2 thema
082 0 4 $a 620.5 $2 23
245 1 0 $a Micro Electro Mechanical Systems $h [electronic resource] / $c edited by Qing-An Huang.
264 1 $a Singapore : $b Springer Singapore : $b Imprint: Springer, $c 2020.
300 $b online resource.
336 $a text $b txt $2 rdacontent
337 $a computer $b c $2 rdamedia
338 $a online resource $b cr $2 rdacarrier
347 $a text file $b PDF $2 rda
490 1 $a Micro/Nano Technologies, $x 2522-5065 ; $v 2
505 0 $a Device Physics -- Scaling effect -- Sensors -- Actuators -- RF MEMS -- Micro fluid and bio MEMS -- Integration techniques -- Micro systems.
520 $a This handbook volume aims to provide a comprehensive, self-contained, and authoritative reference in MEMS. It covers the theoretical and practical aspects including but not limited to sensors, actuators, RF MEMS, micro fluids and bio MEMS systems. It is particularly recommended to undergraduates, postgraduates, researchers, scientists, and field experts. This comprehensive summary will provide a solid knowledge background and inspire innovations in this highly interdisciplinary field. The handbook series consists of 5 volumes: Micro/nano fabrication technology, MEMS, Nanomaterial, Nanomedicine and Applications of micro-/nanotechnologies in IT. Experienced researchers and experts are invited to contribute in each of these areas.The series is published under Springer Major Reference works, which allows continuous online update and publication. These features allow newcomers and other readers to keep in touch with the most up-to-date information in micro-/nanotechnologies.It presents an overview of the knowledge base, as well as selected topics and provides comprehensive and authoritative information on the field for researchers, engineers, scientists and graduate students who are involved in different aspects of micro-/nanotechnologies.This publication will provide inspiration for innovative research and application ideas for continued growth of the field.
650 2 4 $a Microwaves, RF and Optical Engineering. $3 593918
650 2 4 $a Electronics and Microelectronics, Instrumentation. $3 670219
650 1 4 $a Nanotechnology and Microengineering. $3 722030
650 0 $a Optical engineering. $3 720802
650 0 $a Microwaves. $3 636639
650 0 $a Microelectronics. $3 554956
650 0 $a Electronics. $3 596389
650 0 $a Mechatronics. $3 559133
650 0 $a Nanotechnology. $3 557660
700 1 $a Huang, Qing-An. $4 edt $4 http://id.loc.gov/vocabulary/relators/edt $3 1203746
710 2 $a SpringerLink (Online service) $3 593884
773 0 $t Springer Nature Living Reference
830 0 $a Micro/Nano Technologies, $x 2522-5065 $3 1283866
856 4 0 $u https://doi.org/10.1007/978-981-10-2798-7
912 $a ZDB-2-ENG
912 $a ZDB-2-SXRC
912 $a ZDB-2-SLR
950 $a Engineering (SpringerNature-11647)
950 $a Reference Module Computer Science and Engineering (SpringerNature-43748)