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High-K gate dielectrics /

Houssa, Michel.

High-K gate dielectrics /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	High-K gate dielectrics // edited by Michel Houssa.
remainder title:	High kappa gate dielectrics
other author:	Houssa, Michel.
Published:	Boca Raton, FL :CRC Press,Taylor & Francis Group, : 2019, c2004.,
Description:	xi, 601 p. :ill., form ; : 24 cm.;
Notes:	First published 2004 by IOP Publishing Ltd.
Subject:	Gate array circuits - Materials. -
ISBN:	9780367454449 (pbk.) :

High-K gate dielectrics /
High-K gate dielectrics /High kappa gate dielectricsedited by Michel Houssa. - Boca Raton, FL :CRC Press,Taylor & Francis Group,2019, c2004. - xi, 601 p. :ill., form ;24 cm. - Series in materials science and engineering. - Series in materials science and engineering..

First published 2004 by IOP Publishing Ltd.

Includes bibiographical references and index.

"The drive toward smaller and smaller electronic componentry has huge implications for the materials currently being used. As quantum mechanical effects begin to dominate, conventional materials will be unable to function at scales much smaller than those in current use. For this reason, new materials with higher electrical permittivity will be required, making this is a subject of intensive research activity within the microelectronics community. High k Gate Dielectrics reviews the state-of-the-art in high permittivity gate dielectric research. Consisting of contributions from leading researchers from Europe and the USA, the book first describes the various deposition techniques used for construction of layers at these dimensions. It then considers characterization techniques of the physical, chemical, structural, and electronic properties of these materials. The book also reviews the theoretical work done in the field and concludes with technological applications."--

ISBN: 9780367454449 (pbk.) :NT2218Subjects--Topical Terms:

1328920
Gate array circuits
--Materials.

LC Class. No.: TK7871.99.M44 / H49

Dewey Class. No.: 621.3815/2

High-K gate dielectrics /
LDR:01780nam a2200241 a 4500 001 1031450
003 OCoLC
005 20040608164547.0
008 210409r20192004enkak b 001 0 eng
020 $a 9780367454449 (pbk.) : $c NT2218
020 $a 9780750309066 (hbk.)
035 $a 006
040 $a NFU $b eng $e aacr2
050 0 0 $a TK7871.99.M44 $b H49
082 0 0 $a 621.3815/2 $2 22
245 0 0 $a High-K gate dielectrics / $c edited by Michel Houssa.
246 3 # $a High kappa gate dielectrics
260 # $a Boca Raton, FL : $b CRC Press,Taylor & Francis Group, $c 2019, c2004.
300 $a xi, 601 p. : $b ill., form ; $c 24 cm.
490 1 $a Series in materials science and engineering
500 $a First published 2004 by IOP Publishing Ltd.
500 $a First issued in paperback 2019.
504 $a Includes bibiographical references and index.
520 # $a "The drive toward smaller and smaller electronic componentry has huge implications for the materials currently being used. As quantum mechanical effects begin to dominate, conventional materials will be unable to function at scales much smaller than those in current use. For this reason, new materials with higher electrical permittivity will be required, making this is a subject of intensive research activity within the microelectronics community. High k Gate Dielectrics reviews the state-of-the-art in high permittivity gate dielectric research. Consisting of contributions from leading researchers from Europe and the USA, the book first describes the various deposition techniques used for construction of layers at these dimensions. It then considers characterization techniques of the physical, chemical, structural, and electronic properties of these materials. The book also reviews the theoretical work done in the field and concludes with technological applications."-- $c Amazon.com
650 # 0 $a Gate array circuits $x Materials. $3 1328920
650 # 0 $a Metal oxide semiconductors $x Materials. $3 1328921
650 # 0 $a Metal oxide semiconductors, Complementary $x Materials. $3 886893
650 # 0 $a Dielectrics $x Research. $3 1328922
650 # 0 $a Dielectric devices. $3 795687
700 1 # $a Houssa, Michel. $3 1148372
830 0 $a Series in materials science and engineering. $3 1148375