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High-K gate dielectrics /

Houssa, Michel.

High-K gate dielectrics /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	High-K gate dielectrics // edited by Michel Houssa.
其他題名:	High kappa gate dielectrics
其他作者:	Houssa, Michel.
出版者:	Boca Raton, FL :CRC Press,Taylor & Francis Group, : 2019, c2004.,
面頁冊數:	xi, 601 p. :ill., form ; : 24 cm.;
附註:	First published 2004 by IOP Publishing Ltd.
標題:	Dielectric devices. -
ISBN:	9780367454449 (pbk.) :

High-K gate dielectrics /
High-K gate dielectrics /High kappa gate dielectricsedited by Michel Houssa. - Boca Raton, FL :CRC Press,Taylor & Francis Group,2019, c2004. - xi, 601 p. :ill., form ;24 cm. - Series in materials science and engineering. - Series in materials science and engineering..

First published 2004 by IOP Publishing Ltd.

Includes bibiographical references and index.

"The drive toward smaller and smaller electronic componentry has huge implications for the materials currently being used. As quantum mechanical effects begin to dominate, conventional materials will be unable to function at scales much smaller than those in current use. For this reason, new materials with higher electrical permittivity will be required, making this is a subject of intensive research activity within the microelectronics community. High k Gate Dielectrics reviews the state-of-the-art in high permittivity gate dielectric research. Consisting of contributions from leading researchers from Europe and the USA, the book first describes the various deposition techniques used for construction of layers at these dimensions. It then considers characterization techniques of the physical, chemical, structural, and electronic properties of these materials. The book also reviews the theoretical work done in the field and concludes with technological applications."--

ISBN: 9780367454449 (pbk.) :NT2218Subjects--Topical Terms:

795687
Dielectric devices.

LC Class. No.: TK7871.99.M44 / H49

Dewey Class. No.: 621.3815/2

High-K gate dielectrics /
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260 # $a Boca Raton, FL : $b CRC Press,Taylor & Francis Group, $c 2019, c2004.
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490 1 $a Series in materials science and engineering
500 $a First published 2004 by IOP Publishing Ltd.
500 $a First issued in paperback 2019.
504 $a Includes bibiographical references and index.
520 # $a "The drive toward smaller and smaller electronic componentry has huge implications for the materials currently being used. As quantum mechanical effects begin to dominate, conventional materials will be unable to function at scales much smaller than those in current use. For this reason, new materials with higher electrical permittivity will be required, making this is a subject of intensive research activity within the microelectronics community. High k Gate Dielectrics reviews the state-of-the-art in high permittivity gate dielectric research. Consisting of contributions from leading researchers from Europe and the USA, the book first describes the various deposition techniques used for construction of layers at these dimensions. It then considers characterization techniques of the physical, chemical, structural, and electronic properties of these materials. The book also reviews the theoretical work done in the field and concludes with technological applications."-- $c Amazon.com
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650 # 0 $a Metal oxide semiconductors, Complementary $x Materials. $3 886893
650 # 0 $a Metal oxide semiconductors $x Materials. $3 1328921
650 # 0 $a Gate array circuits $x Materials. $3 1328920
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