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Levitation Micro-Systems = Applicati...

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Levitation Micro-Systems = Applications to Sensors and Actuators /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Levitation Micro-Systems/ by Kirill Poletkin.
其他題名:	Applications to Sensors and Actuators /
作者:	Poletkin, Kirill.
面頁冊數:	IX, 174 p. 93 illus., 91 illus. in color.online resource. :
Contained By:	Springer Nature eBook
標題:	Materials Science, general. -
電子資源:	https://doi.org/10.1007/978-3-030-58908-0
ISBN:	9783030589080

Levitation Micro-Systems = Applications to Sensors and Actuators /
Poletkin, Kirill.

Levitation Micro-SystemsApplications to Sensors and Actuators /[electronic resource] :by Kirill Poletkin. - 1st ed. 2021. - IX, 174 p. 93 illus., 91 illus. in color.online resource. - Microsystems and Nanosystems,2198-0071. - Microsystems and Nanosystems,.

Introduction to levitation micro-systems -- Micro-fabrication techniques -- Analytical modelling -- Quasi-finite element modelling -- Inductive levitation micro-systems -- Hybrid levitation micro-systems -- Mechanical thermal noise in levitated micro-gyroscopes.

This book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and –actuators. It proposes and discusses analytical and quasi-finite element techniques for modeling levitation micro-systems based on the Lagrangian formalism. In particular, micro-bearings, -actuators, -accelerators and –accelerometers based on inductive levitation are comprehensively described with accompanying experimental measurements.

ISBN: 9783030589080

Standard No.: 10.1007/978-3-030-58908-0doiSubjects--Topical Terms:

683521
Materials Science, general.

LC Class. No.: T174.7

Dewey Class. No.: 620.5

Levitation Micro-Systems = Applications to Sensors and Actuators /
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