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Microlithography = science and techn...

ProQuest (Firm)

Microlithography = science and technology /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Microlithography/ edited by Kazuaki Suzuki, Bruce W. Smith.
其他題名:	science and technology /
其他作者:	Smith, Bruce W.,
出版者:	Boca Raton :CRC Press, : c2007.,
面頁冊數:	848 p. :ill. :
標題:	Manufacturing processes. -
電子資源:	Click to View

Microlithography = science and technology /
Microlithographyscience and technology /[electronic resource] :edited by Kazuaki Suzuki, Bruce W. Smith. - 2nd ed. - Boca Raton :CRC Press,c2007. - 848 p. :ill. - Optical science and engineering ;126. - Optical science and engineering (Boca Raton, Fla.) ;138..

Includes bibliographical references and index.

Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.

Subjects--Topical Terms:

564466
Manufacturing processes.
Index Terms--Genre/Form:

554714
Electronic books.

LC Class. No.: TK7836 / .M525 2007

Dewey Class. No.: 621.3815/31

Microlithography = science and technology /
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300 $a 848 p. : $b ill.
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504 $a Includes bibliographical references and index.
533 $a Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
650 0 $a Manufacturing processes. $3 564466
650 0 $a Metal oxide semiconductors, Complementary $x Design and construction. $3 564465
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830 0 $a Optical science and engineering (Boca Raton, Fla.) ; $v 138. $3 744847
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