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Nanolithography and patterning techn...
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ProQuest (Firm)
Nanolithography and patterning techniques in microelectonics
Record Type:
Language materials, printed : Monograph/item
Title/Author:
Nanolithography and patterning techniques in microelectonics/ edited by David G. Bucknall.
other author:
Bucknall, David G.
Published:
Cambridge :Woodhead Pub. ; : c2005.,
Description:
xiv, 409 p. :ill. :
Subject:
Nanotechnology. -
Online resource:
Click to View
Nanolithography and patterning techniques in microelectonics
Nanolithography and patterning techniques in microelectonics
[electronic resource] /edited by David G. Bucknall. - Cambridge :Woodhead Pub. ;c2005. - xiv, 409 p. :ill. - Woodhead Publishing in materials. - Woodhead Publishing in materials..
Includes bibliographical references and index.
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Subjects--Topical Terms:
557660
Nanotechnology.
Index Terms--Genre/Form:
554714
Electronic books.
LC Class. No.: TK7836 / .N36 2005
Nanolithography and patterning techniques in microelectonics
LDR
:01161nam 2200301Ia 4500
001
1075299
003
MiAaPQ
005
20200520144314.0
006
m o d |
007
cr cn|||||||||
008
221104s2005 enka sb 001 0 eng d
020
$z
1855739313 (Woodhead)
020
$z
0849334470 (CRC)
020
$z
1845690907 (e-book)
035
$a
(MiAaPQ)EBC1639701
035
$a
(Au-PeEL)EBL1639701
035
$a
(CaPaEBR)ebr10131844
035
$a
(CaONFJC)MIL56833
035
$a
(OCoLC)871224937
035
$a
EBC1639701
040
$a
MiAaPQ
$c
MiAaPQ
$d
MiAaPQ
050
4
$a
TK7836
$b
.N36 2005
245
0 0
$a
Nanolithography and patterning techniques in microelectonics
$h
[electronic resource] /
$c
edited by David G. Bucknall.
260
$a
Cambridge :
$a
Boca Raton, FL :
$c
c2005.
$b
Woodhead Pub. ;
$b
CRC Press,
300
$a
xiv, 409 p. :
$b
ill.
490
1
$a
Woodhead Publishing in materials
504
$a
Includes bibliographical references and index.
533
$a
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
650
0
$a
Nanotechnology.
$3
557660
650
0
$a
Microlithography.
$3
562355
655
4
$a
Electronic books.
$2
local
$3
554714
700
1
$a
Bucknall, David G.
$3
562356
710
2
$a
ProQuest (Firm)
$3
1133097
830
0
$a
Woodhead Publishing in materials.
$3
561726
856
4 0
$u
https://ebookcentral.proquest.com/lib/nfu/detail.action?docID=1639701
$z
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