Silicon carbide micro electromechani...
Cheung, Rebecca.

 

  • Silicon carbide micro electromechanical systems for harsh environments
  • Record Type: Language materials, printed : Monograph/item
    Title/Author: Silicon carbide micro electromechanical systems for harsh environments/ editor Rebecca Cheung.
    remainder title: Silicon carbide microelectromechanical systems for harsh environments
    other author: Cheung, Rebecca.
    Published: London :Imperial College Press, : c2006.,
    Description: x, 181 p. :ill. :
    Subject: Silicon carbide. -
    Online resource: Click to View
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