| Record Type: |
Language materials, printed
: Monograph/item
|
| Title/Author: |
Atomic layer processing :/ Thorsten Lill. |
| Reminder of title: |
semiconductor dry etching technology / |
| Author: |
Lill, Thorsten. |
| Published: |
Weinheim :Wiley-VCH, : c2021., |
| Description: |
xiv, 284 p. :ill. ; : 25 cm.; |
| Subject: |
Semiconductors - Etching. - |
| ISBN: |
3527346686 (pbk.) |