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Low-Energy Ion Irradiation of Materials = Fundamentals and Application /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Low-Energy Ion Irradiation of Materials/ by Bernd Rauschenbach.
其他題名:	Fundamentals and Application /
作者:	Rauschenbach, Bernd.
面頁冊數:	XXIV, 754 p. 352 illus., 205 illus. in color.online resource. :
Contained By:	Springer Nature eBook
標題:	Nuclear and Particle Physics. -
電子資源:	https://doi.org/10.1007/978-3-030-97277-6
ISBN:	9783030972776

Low-Energy Ion Irradiation of Materials = Fundamentals and Application /
Rauschenbach, Bernd.

Low-Energy Ion Irradiation of MaterialsFundamentals and Application /[electronic resource] :by Bernd Rauschenbach. - 1st ed. 2022. - XXIV, 754 p. 352 illus., 205 illus. in color.online resource. - Springer Series in Materials Science,3242196-2812 ;. - Springer Series in Materials Science,200.

1. Introduction -- 2. Collision processes -- 3. Energy-loss processes and ion range -- 4. Ion beam induced damage -- 5. Sputtering -- 6. Evolution of topography under low-energy ion bombardment -- 7. Ion beam figuring and smoothing -- 8. Ion beam deposition -- 9. Ion beam assisted deposition -- 10. Ion beam sputtering induced glancing angle deposition. .

This book provides a comprehensive introduction to all aspects of low-energy ion–solid interaction from basic principles to advanced applications in materials science. It features a balanced and insightful approach to the fundamentals of the low-energy ion–solid surface interaction, focusing on relevant topics such as interaction potentials, kinetics of binary collisions, ion range, radiation damages, and sputtering. Additionally, the book incorporates key updates reflecting the latest relevant results of modern research on topics such as topography evolution and thin-film deposition under ion bombardment, ion beam figuring and smoothing, generation of nanostructures, and ion beam-controlled glancing angle deposition. Filling a gap of almost 20 years of relevant research activity, this book offers a wealth of information and up-to-date results for graduate students, academic researchers, and industrial scientists working in these areas.

ISBN: 9783030972776

Standard No.: 10.1007/978-3-030-97277-6doiSubjects--Topical Terms:

1366890
Nuclear and Particle Physics.

LC Class. No.: TA418.7-.76

Dewey Class. No.: 620.112

Low-Energy Ion Irradiation of Materials = Fundamentals and Application /
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