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Advanced MEMS/NEMS Fabrication and Sensors

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Advanced MEMS/NEMS Fabrication and Sensors/ edited by Zhuoqing Yang.
其他作者:	Yang, Zhuoqing.
面頁冊數:	VI, 312 p. 167 illus., 157 illus. in color.online resource. :
Contained By:	Springer Nature eBook
標題:	Materials Engineering. -
電子資源:	https://doi.org/10.1007/978-3-030-79749-2
ISBN:	9783030797492

Advanced MEMS/NEMS Fabrication and Sensors
Advanced MEMS/NEMS Fabrication and Sensors[electronic resource] /edited by Zhuoqing Yang. - 1st ed. 2022. - VI, 312 p. 167 illus., 157 illus. in color.online resource.

Tip-based Nanofabrication for MEMS Devices -- 1D-Nanostructured Piezoresistive Microcantilever for Environmental Sensing -- Application of Non-template Special Nanostructure Fabrication Technology in Sensors -- Composite Micro-machining Technology on the Non-silicon MEMS -- Nano-in-Nano Integration for Nanofluidics -- Bionanoscaffolds-enabled Micro/Nanofabrication and Devices -- NEMS Sensors Based on Novel Nanomaterials -- Microfluidic Sensors in Surface Channel Technology -- MOEMS-enabled Miniaturized Biomedical Sensing and Imaging System -- Bio-inspired Flexible Sensors for Flow Field Detection -- Ultrasound MEMS for Biosensing and Biomedical Imaging -- Optofluidic Devices for Bio-analytical Applications.

This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The second section focuses on novel sensors based on these emerging MEMS/NEMS fabrication methods, and their related applications in industrial, biomedical, and environmental monitoring fields, which makes up the sensing layer (or perception layer) in IoT architecture. This authoritative guide offers graduate students, postgraduates, researchers, and practicing engineers with state-of-the-art processes and cutting-edge technologies on MEMS /NEMS, micro- and nanomachining, and microsensors, addressing progress in the field and prospects for future development. Presents latest international research on MEMS/NEMS fabrication technologies and novel micro/nano sensors; Covers a broad spectrum of sensor applications; Written by leading experts in the field.

ISBN: 9783030797492

Standard No.: 10.1007/978-3-030-79749-2doiSubjects--Topical Terms:

1062318
Materials Engineering.

LC Class. No.: TK7875

Dewey Class. No.: 621.381

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