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Spectroscopic techniques for semiconductor industry /
紀錄類型:
書目-語言資料,印刷品 : Monograph/item
正題名/作者:
Spectroscopic techniques for semiconductor industry // Vladimir Protopopov.
作者:
Protopopov, V. V.
出版者:
New Jersey :World Scientific, : c2023.,
面頁冊數:
xiv, 310 p. :ill. (some col.) ; : 29 cm.;
標題:
Semiconductors - Design and construction. -
ISBN:
9789811257599 (cloth) :
Spectroscopic techniques for semiconductor industry /
Protopopov, V. V.
Spectroscopic techniques for semiconductor industry /
Vladimir Protopopov. - New Jersey :World Scientific,c2023. - xiv, 310 p. :ill. (some col.) ;29 cm.
Includes bibliographical references and index.
Basics of grating spectrometers -- Basics of Fourier-transform spectrometers -- High-resolution spectroscopy -- Imaging spectrometers -- Gated intensified spectrometers -- Modulation-sensitive and frequency-selective spectroscopy -- Optical diagnostics in plasma etching machines -- Spectral reflectometry -- Related non-spectroscopic techniques.
ISBN: 9789811257599 (cloth) :NT3622
LCCN: 2022021000Subjects--Topical Terms:
599469
Semiconductors
--Design and construction.
LC Class. No.: QC451.6 / .P76 2023
Dewey Class. No.: 621.36/1
Spectroscopic techniques for semiconductor industry /
LDR
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Includes bibliographical references and index.
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Basics of grating spectrometers -- Basics of Fourier-transform spectrometers -- High-resolution spectroscopy -- Imaging spectrometers -- Gated intensified spectrometers -- Modulation-sensitive and frequency-selective spectroscopy -- Optical diagnostics in plasma etching machines -- Spectral reflectometry -- Related non-spectroscopic techniques.
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906863
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