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Spectroscopic techniques for semiconductor industry /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Spectroscopic techniques for semiconductor industry // Vladimir Protopopov.
Author:	Protopopov, V. V.
Published:	New Jersey :World Scientific, : c2023.,
Description:	xiv, 310 p. :ill. (some col.) ; : 29 cm.;
Subject:	Spectrum analysis - Industrial applications. -
ISBN:	9789811257599 (cloth) :

Spectroscopic techniques for semiconductor industry /
Protopopov, V. V.

Spectroscopic techniques for semiconductor industry /Vladimir Protopopov. - New Jersey :World Scientific,c2023. - xiv, 310 p. :ill. (some col.) ;29 cm.

Includes bibliographical references and index.

Basics of grating spectrometers -- Basics of Fourier-transform spectrometers -- High-resolution spectroscopy -- Imaging spectrometers -- Gated intensified spectrometers -- Modulation-sensitive and frequency-selective spectroscopy -- Optical diagnostics in plasma etching machines -- Spectral reflectometry -- Related non-spectroscopic techniques.

ISBN: 9789811257599 (cloth) :NT3622

LCCN: 2022021000Subjects--Topical Terms:

906863
Spectrum analysis
--Industrial applications.

LC Class. No.: QC451.6 / .P76 2023

Dewey Class. No.: 621.36/1

Spectroscopic techniques for semiconductor industry /
LDR:01134cam a2200253 a 450 001 1103880
003 OCoLC
005 20230608212752.0
008 230627s2023 njua b 001 0 eng
010 $a 2022021000
020 $a 9789811257599 (cloth) : $c NT3622
020 $z 9789811257605 (ebook for institutions)
020 $z 9789811257612 (ebook for individuals)
035 $a (OCoLC)1341845698
035 $a on1341845698
040 $a LBSOR/DLC $b eng $c NFU $d YDX
041 0 # $a eng
042 $a pcc
050 0 0 $a QC451.6 $b .P76 2023
082 0 0 $a 621.36/1 $2 23
100 1 $a Protopopov, V. V. $q (Vladimir Vsevolodovich) $3 910206
245 1 0 $a Spectroscopic techniques for semiconductor industry / $c Vladimir Protopopov.
260 # $a New Jersey : $b World Scientific, $c c2023.
300 $a xiv, 310 p. : $b ill. (some col.) ; $c 29 cm.
504 $a Includes bibliographical references and index.
505 0 # $a Basics of grating spectrometers -- Basics of Fourier-transform spectrometers -- High-resolution spectroscopy -- Imaging spectrometers -- Gated intensified spectrometers -- Modulation-sensitive and frequency-selective spectroscopy -- Optical diagnostics in plasma etching machines -- Spectral reflectometry -- Related non-spectroscopic techniques.
650 # 0 $a Spectrum analysis $x Industrial applications. $3 906863
650 # 0 $a Semiconductors $x Design and construction. $3 599469

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E048561

圖書館3F 書庫

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621.361 P967 2023

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1 records • Pages 1 •
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