| Record Type: |
Language materials, printed
: Monograph/item
|
| Title/Author: |
Stress and strain engineering at nanoscale in semiconductor devices // Chinmay K. Maiti. |
| Author: |
Maiti, C. K. |
| Published: |
Boca Raton ;CRC Press, : c2021., |
| Description: |
xiii, 260 p. :ill., port. ; : 24 cm.; |
| Subject: |
Strains and stresses. - |
| ISBN: |
9780367519292 |