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同心圓光柵導模共振感測器之製作與量測 = = Fabrication a...

張紋綾

同心圓光柵導模共振感測器之製作與量測 = = Fabrication and Measurement of Concentric Circular Grating Guided-Mode Resonance Sensor /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	同心圓光柵導模共振感測器之製作與量測 =/ 張紋綾.
Reminder of title:	Fabrication and Measurement of Concentric Circular Grating Guided-Mode Resonance Sensor /
remainder title:	Fabrication and Measurement of Concentric Circular Grating Guided-Mode Resonance Sensor.
Author:	張紋綾
Published:	雲林縣 :國立虎尾科技大學 , : 民113.07.,
Description:	[8], 53面 :圖, 表 ; : 30公分.;
Notes:	指導教授: 郭文凱, 蔡裕勝.
Subject:	concentric grating. -
Online resource:	電子資源

同心圓光柵導模共振感測器之製作與量測 = = Fabrication and Measurement of Concentric Circular Grating Guided-Mode Resonance Sensor /
張紋綾

同心圓光柵導模共振感測器之製作與量測 =Fabrication and Measurement of Concentric Circular Grating Guided-Mode Resonance Sensor /Fabrication and Measurement of Concentric Circular Grating Guided-Mode Resonance Sensor.張紋綾. - 初版. - 雲林縣 :國立虎尾科技大學 ,民113.07. - [8], 53面 :圖, 表 ;30公分.

指導教授: 郭文凱, 蔡裕勝.

碩士論文--國立虎尾科技大學光電工程系光電與材料科技碩士班.

含參考書目.

本論文探討同心圓光柵導模共振感測器之製作與量測。製作同心圓光柵使用了Tanner Tools L-Edit積體電路設計軟體與AutoHotKey積木語法產生器來繪製同心圓，圖形大小設計為5 mm、週期420 nm；再由國研院台灣半導體研究中心(TSRI)的可變形束電子束曝光機、ACT8阻劑塗佈及顯影系統與乾式蝕刻進行製程製作。製作完元件後透過SEM 量測的實際結果:光柵線寬內圍中心點為203.1nm、211.8nm，外圍中心點為213.1nm、211.1nm；使用全自動表面輪廓量測蝕刻深度為975 Å。在製作完光柵後會先利用濺鍍的方式在玻璃基板鍍上高折射率材料-二氧化鈦薄膜形成波導結構，再使用市售的二氧化鈦溶膠凝膠將光柵結構壓印在二氧化鈦薄膜上，此為先鍍後壓製程。在實驗上我們使用葡萄糖水在光柵面與玻璃基板夾層中注入分次0%、2%、4%、6%來製作液體感測器。感測器工作原理:當葡萄糖的濃度增加時溶液的折射率也會隨之增加；共振波長的偏移或共振強度也會隨之變化。從實驗結果可看出隨著葡萄糖濃度的增加；共振的位移方向會往右邊移動其共振角度變大。我們測試了兩種不同結構的光柵看會不會影響靈敏度的變化，從實驗結果量測出同心圓的共振角位移量相較線性光柵好約兩倍的效果。.

(平裝)Subjects--Topical Terms:

1449936
concentric grating.

同心圓光柵導模共振感測器之製作與量測 = = Fabrication and Measurement of Concentric Circular Grating Guided-Mode Resonance Sensor /
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245 1 0 $a 同心圓光柵導模共振感測器之製作與量測 = $b Fabrication and Measurement of Concentric Circular Grating Guided-Mode Resonance Sensor / $c 張紋綾.
246 1 1 $a Fabrication and Measurement of Concentric Circular Grating Guided-Mode Resonance Sensor.
250 $a 初版.
260 # $a 雲林縣 : $b 國立虎尾科技大學 , $c 民113.07.
300 $a [8], 53面 : $b 圖, 表 ; $c 30公分.
500 $a 指導教授: 郭文凱, 蔡裕勝.
500 $a 學年度: 112.
502 $a 碩士論文--國立虎尾科技大學光電工程系光電與材料科技碩士班.
504 $a 含參考書目.
520 3 $a 本論文探討同心圓光柵導模共振感測器之製作與量測。製作同心圓光柵使用了Tanner Tools L-Edit積體電路設計軟體與AutoHotKey積木語法產生器來繪製同心圓，圖形大小設計為5 mm、週期420 nm；再由國研院台灣半導體研究中心(TSRI)的可變形束電子束曝光機、ACT8阻劑塗佈及顯影系統與乾式蝕刻進行製程製作。製作完元件後透過SEM 量測的實際結果:光柵線寬內圍中心點為203.1nm、211.8nm，外圍中心點為213.1nm、211.1nm；使用全自動表面輪廓量測蝕刻深度為975 Å。在製作完光柵後會先利用濺鍍的方式在玻璃基板鍍上高折射率材料-二氧化鈦薄膜形成波導結構，再使用市售的二氧化鈦溶膠凝膠將光柵結構壓印在二氧化鈦薄膜上，此為先鍍後壓製程。在實驗上我們使用葡萄糖水在光柵面與玻璃基板夾層中注入分次0%、2%、4%、6%來製作液體感測器。感測器工作原理:當葡萄糖的濃度增加時溶液的折射率也會隨之增加；共振波長的偏移或共振強度也會隨之變化。從實驗結果可看出隨著葡萄糖濃度的增加；共振的位移方向會往右邊移動其共振角度變大。我們測試了兩種不同結構的光柵看會不會影響靈敏度的變化，從實驗結果量測出同心圓的共振角位移量相較線性光柵好約兩倍的效果。.
520 3 $a This study discusses the fabrication and measurement of concentric grating guided-mode resonant sensors. To create concentric circle gratings, Tanner Tools L-Edit integrated circuit design software and AutoHotKey building block syntax generator are used to draw concentric circles. The graphic size is designed to be 5 mm, and the period is 420 nm; then the Taiwan Semiconductor Research Center (TSRI) of the National Research Institute The deformable electron beam exposure machine, ACT8 resist coating and development system and dry etching are used for process production. The actual results were measured through SEM after the component was produced: the inner center point of the grating line width is 203.1nm, 211.8nm, and the outer center point is 213.1nm, 211.1nm; the etching depth measured using fully automatic surface profiling is 975 Å. After the grating, the glass substrate is first coated with a high refractive index material - titanium dioxide film by sputtering to form a waveguide structure. Then, commercially available titanium dioxide sol-gel imprints the grating structure on the titanium dioxide film. Post-plating pressing process. In experiments, we used glucose water to inject 0%, 2%, 4%, and 6% into the interlayer between the grating surface and the glass substrate to make a liquid sensor. When the concentration of glucose increases, the solution's refractive index will also increase; the resonance wavelength shift or intensity will also change accordingly. It can be seen from the experimental results that as the glucose concentration increases, the displacement direction of the resonance will move to the right, and the resonance angle will become more significant. We tested two gratings with different structures to see if they would affect changes in sensitivity. From the experimental results, we measured that the resonance angular displacement of concentric circles is about twice as good as that of linear gratings..
563 $a (平裝)
650 # 4 $a concentric grating. $3 1449936
650 # 4 $a nanoimprinting. $3 1086329
650 # 4 $a guided-mode resonance. $3 1339546
650 # 4 $a 同心圓光柵. $3 1449935
650 # 4 $a 奈米壓印. $3 997511
650 # 4 $a 導模共振. $3 1015634
856 7 # $u https://handle.ncl.edu.tw/11296/kb2jsz $z 電子資源 $2 http