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自組裝奈米球應用於製備具奈米陣列金屬結構之研究 = = A study ...

陳彥築

自組裝奈米球應用於製備具奈米陣列金屬結構之研究 = = A study on the application of the self-assembled nanospheres for preparing a metal thin with the nano-array structure /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	自組裝奈米球應用於製備具奈米陣列金屬結構之研究 =/ 陳彥築.
其他題名:	A study on the application of the self-assembled nanospheres for preparing a metal thin with the nano-array structure /
其他題名:	A study on the application of the self-assembled nanospheres for preparing a metal thin with the nano-array structure.
作者:	陳彥築
出版者:	雲林縣 :國立虎尾科技大學 , : 民113.07.,
面頁冊數:	[10], 79面 :圖, 表 ; : 30公分.;
附註:	指導教授: 劉代山.
標題:	電漿增強化學氣相沉積系統. -
電子資源:	電子資源

自組裝奈米球應用於製備具奈米陣列金屬結構之研究 = = A study on the application of the self-assembled nanospheres for preparing a metal thin with the nano-array structure /
陳彥築

自組裝奈米球應用於製備具奈米陣列金屬結構之研究 =A study on the application of the self-assembled nanospheres for preparing a metal thin with the nano-array structure /A study on the application of the self-assembled nanospheres for preparing a metal thin with the nano-array structure.陳彥築. - 初版. - 雲林縣 :國立虎尾科技大學 ,民113.07. - [10], 79面 :圖, 表 ;30公分.

指導教授: 劉代山.

碩士論文--國立虎尾科技大學光電工程系光電與材料科技碩士班.

含參考書目.

本研究先以電漿增強化學氣相沉積系統(Plasma-Enhanced Chemical Vapor Deposition；PECVD)對基板進行表面改質，透過旋轉塗佈法(sping coating)製備單層聚苯乙烯(Polystrene)奈米球陣列結構，並使用射頻磁控共濺鍍系統(RF magnetron co-sputtering system)，將50 nm的銀(Ag)、鋁(Al)、鈦(Ti)金屬分別沉積於奈米球上，觀察其金屬/奈米球陣列結構的表面形貌及粗糙度，再利用快速熱退火爐(Rapid Thermal Annealing, RTA)對薄膜進行退火，討論退火對不同金屬與奈米球造成的結構變化，最後藉由丙酮輔助舉離實現金屬陣列結構。實驗量測透過原子力顯微鏡(AFM)以及紫外光-可見光光譜儀(UV-Vis spectrum)，分析薄膜的表面結構特性與光學特性，藉由ImageJ程式對金屬粒徑進行量測與分析。實驗結果顯示，對比單層的金屬薄膜，當金屬沉積於奈米球時，在可見光波段出現特定波長的吸收；經退火後發現奈米球因氣化與基板表面分離，而鈦在高溫下粒子並不會產生明顯的團聚，仍然為持奈米陣列結構，有利於在後續舉離時觀察結構變化，通過控制退火溫度及時間並以丙酮舉離成功製備蜂巢狀金屬結構。.

(平裝)Subjects--Topical Terms:

1015142
電漿增強化學氣相沉積系統.

自組裝奈米球應用於製備具奈米陣列金屬結構之研究 = = A study on the application of the self-assembled nanospheres for preparing a metal thin with the nano-array structure /
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245 1 0 $a 自組裝奈米球應用於製備具奈米陣列金屬結構之研究 = $b A study on the application of the self-assembled nanospheres for preparing a metal thin with the nano-array structure / $c 陳彥築.
246 1 1 $a A study on the application of the self-assembled nanospheres for preparing a metal thin with the nano-array structure.
250 $a 初版.
260 # $a 雲林縣 : $b 國立虎尾科技大學 , $c 民113.07.
300 $a [10], 79面 : $b 圖, 表 ; $c 30公分.
500 $a 指導教授: 劉代山.
500 $a 學年度: 112.
502 $a 碩士論文--國立虎尾科技大學光電工程系光電與材料科技碩士班.
504 $a 含參考書目.
520 3 $a 本研究先以電漿增強化學氣相沉積系統(Plasma-Enhanced Chemical Vapor Deposition；PECVD)對基板進行表面改質，透過旋轉塗佈法(sping coating)製備單層聚苯乙烯(Polystrene)奈米球陣列結構，並使用射頻磁控共濺鍍系統(RF magnetron co-sputtering system)，將50 nm的銀(Ag)、鋁(Al)、鈦(Ti)金屬分別沉積於奈米球上，觀察其金屬/奈米球陣列結構的表面形貌及粗糙度，再利用快速熱退火爐(Rapid Thermal Annealing, RTA)對薄膜進行退火，討論退火對不同金屬與奈米球造成的結構變化，最後藉由丙酮輔助舉離實現金屬陣列結構。實驗量測透過原子力顯微鏡(AFM)以及紫外光-可見光光譜儀(UV-Vis spectrum)，分析薄膜的表面結構特性與光學特性，藉由ImageJ程式對金屬粒徑進行量測與分析。實驗結果顯示，對比單層的金屬薄膜，當金屬沉積於奈米球時，在可見光波段出現特定波長的吸收；經退火後發現奈米球因氣化與基板表面分離，而鈦在高溫下粒子並不會產生明顯的團聚，仍然為持奈米陣列結構，有利於在後續舉離時觀察結構變化，通過控制退火溫度及時間並以丙酮舉離成功製備蜂巢狀金屬結構。.
520 3 $a In this study, the surface modification of the substrate was carried out by plasma enhanced chemical vapor deposition (PECVD) system, and the single-layer polystyrene nano-sphere array structure was prepared by spin-coating method. 50 nm silver (Ag), aluminum (Al), and titanium (Ti) metals were deposited onto the nano-sphere by using radio-frequency magnetron sputtering (RF-MCSP) system, and the surface morphology and roughness of the metal/nano-sphere array structure were observed, and the surface morphology and roughness of the metal/nano-sphere array structure were investigated, and the surface morphology and roughness of the metal/nano-sphere array structure were investigated. The films were annealed in a Rapid Thermal Annealing (RTA) furnace to discuss the structural changes caused by the annealing on different metals and nanospheres, and finally the metal array structures were realized by acetone-assisted lift-off. The experimental measurements were carried out by atomic force microscopy (AFM) and ultraviolet-visible spectroscopy (UV-VIS) to analyze the surface structural and optical properties of the films, and the metal particle size was measured and analyzed by ImageJ program. The experimental results show that compared with the single-layer metal film, when the metal is deposited in the nanorods, the absorption of specific wavelengths occurs in the visible wavelength band; after annealing, it is found that the nanorods are separated from the surface of the substrate due to the vaporization, and the titanium particles do not produce obvious agglomeration at high temperatures, and remain in the nano array structure, which is conducive to the structural changes observed in subsequent lifting off, and the honeycomb metal structure is successfully fabricated through the control of the annealing temperature and time, and the lifting off of the titanium in acetone. By controlling the annealing temperature and time and lifting off with acetone, the honeycomb metal structure was successfully fabricated..
563 $a (平裝)
650 # 4 $a 電漿增強化學氣相沉積系統. $3 1015142
650 # 4 $a 聚苯乙烯奈米球. $3 1339455
650 # 4 $a 快速熱退火. $3 996029
650 # 4 $a 舉離. $3 1449850
650 # 4 $a 蜂巢狀金屬結構. $3 1449851
650 # 4 $a plasma-reinforced chemical vapor deposition system. $3 1449852
650 # 4 $a polystyrene nanospheres. $3 1339460
650 # 4 $a rapid thermal annealing. $3 1449853
650 # 4 $a lift-off. $3 1449854
650 # 4 $a honeycomb metallic structures. $3 1449855
856 7 # $u https://handle.ncl.edu.tw/11296/egfrh9 $z 電子資源 $2 http