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氧化鋅薄膜沉積於自組裝奈米球表面之研究 = = A study on t...

黃知威

氧化鋅薄膜沉積於自組裝奈米球表面之研究 = = A study on the zinc oxide thin film deposited onto the self-assembled nanospheres /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	氧化鋅薄膜沉積於自組裝奈米球表面之研究 =/ 黃知威.
Reminder of title:	A study on the zinc oxide thin film deposited onto the self-assembled nanospheres /
remainder title:	A study on the zinc oxide thin film deposited onto the self-assembled nanospheres.
Author:	黃知威
Published:	雲林縣 :國立虎尾科技大學 , : 民113.07.,
Description:	[9], 67面 :圖, 表 ; : 30公分.;
Notes:	指導教授: 劉代山, 廖得照.
Subject:	structured zinc oxide. -
Online resource:	電子資源

氧化鋅薄膜沉積於自組裝奈米球表面之研究 = = A study on the zinc oxide thin film deposited onto the self-assembled nanospheres /
黃知威

氧化鋅薄膜沉積於自組裝奈米球表面之研究 =A study on the zinc oxide thin film deposited onto the self-assembled nanospheres /A study on the zinc oxide thin film deposited onto the self-assembled nanospheres.黃知威. - 初版. - 雲林縣 :國立虎尾科技大學 ,民113.07. - [9], 67面 :圖, 表 ;30公分.

指導教授: 劉代山, 廖得照.

碩士論文--國立虎尾科技大學光電工程系光電與材料科技碩士班.

含參考書目.

本研究利用電漿化學氣象沉積系統將基板表面改質至超親水特性，使用旋轉塗佈法在表面改質後的基板製備單層聚苯乙烯奈米球陣列結構，再利用氧電漿蝕刻製程將奈米球尺寸縮小，並使用射頻磁控共濺鍍系統分別在未蝕刻以及蝕刻後之奈米球表面沉積厚度約200 nm之未摻雜氧化鋅薄膜，並利用快速熱退火系統在氮氣環境下進行700oC熱處理1分鐘，最後，再開發熱舉離製程，將試片浸泡丙酮溶液並適當進行震洗，以舉離方式得到不同氧化鋅奈米陣列結構。為了研究不同厚度氧化鋅對於奈米點陣列結構影響，使用射頻磁控共濺鍍系統在單層聚苯乙烯奈米球表面沉積不同厚度(100 nm及300 nm)的未摻雜氧化鋅薄膜，利用快速熱退火系統在氮氣環境下進行700oC熱處理1分鐘，再利用熱舉離製程，將試片浸泡丙酮溶液並適當進行震洗，以舉離方式得到氧化鋅奈米點陣列結構。研究透過原子粒顯微鏡(AFM)、霍爾量測、紫外光-可見光光譜儀、光激發螢光量測系統(PL)等儀器進行量測及分析表面形貌和光電特性。.

(平裝)Subjects--Topical Terms:

1421655
structured zinc oxide.

氧化鋅薄膜沉積於自組裝奈米球表面之研究 = = A study on the zinc oxide thin film deposited onto the self-assembled nanospheres /
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100 1 $a 黃知威 $3 1449039
245 1 0 $a 氧化鋅薄膜沉積於自組裝奈米球表面之研究 = $b A study on the zinc oxide thin film deposited onto the self-assembled nanospheres / $c 黃知威.
246 1 1 $a A study on the zinc oxide thin film deposited onto the self-assembled nanospheres.
250 $a 初版.
260 # $a 雲林縣 : $b 國立虎尾科技大學 , $c 民113.07.
300 $a [9], 67面 : $b 圖, 表 ; $c 30公分.
500 $a 指導教授: 劉代山, 廖得照.
500 $a 學年度: 112.
502 $a 碩士論文--國立虎尾科技大學光電工程系光電與材料科技碩士班.
504 $a 含參考書目.
520 3 $a 本研究利用電漿化學氣象沉積系統將基板表面改質至超親水特性，使用旋轉塗佈法在表面改質後的基板製備單層聚苯乙烯奈米球陣列結構，再利用氧電漿蝕刻製程將奈米球尺寸縮小，並使用射頻磁控共濺鍍系統分別在未蝕刻以及蝕刻後之奈米球表面沉積厚度約200 nm之未摻雜氧化鋅薄膜，並利用快速熱退火系統在氮氣環境下進行700oC熱處理1分鐘，最後，再開發熱舉離製程，將試片浸泡丙酮溶液並適當進行震洗，以舉離方式得到不同氧化鋅奈米陣列結構。為了研究不同厚度氧化鋅對於奈米點陣列結構影響，使用射頻磁控共濺鍍系統在單層聚苯乙烯奈米球表面沉積不同厚度(100 nm及300 nm)的未摻雜氧化鋅薄膜，利用快速熱退火系統在氮氣環境下進行700oC熱處理1分鐘，再利用熱舉離製程，將試片浸泡丙酮溶液並適當進行震洗，以舉離方式得到氧化鋅奈米點陣列結構。研究透過原子粒顯微鏡(AFM)、霍爾量測、紫外光-可見光光譜儀、光激發螢光量測系統(PL)等儀器進行量測及分析表面形貌和光電特性。.
520 3 $a In this study, a plasma chemical vapor deposition system was used to modify the substrate surface to super-hydrophilic properties, and a spin coating method was used to prepare a single-layer polystyrene nanosphere array structure on the surface-modified substrate, and then oxygen plasma etching was used The process reduces the size of the nanospheres, and uses a radio frequency magnetron co-sputtering system to deposit an undoped zinc oxide film with a thickness of about 200 nm on the surface of the unetched and etched nanospheres, and uses a rapid thermal annealing system in nitrogen. Heat treatment at 700oC for 1 minute was carried out in the environment. Finally, a thermal lift-off process was developed. The test piece was immersed in acetone solution and properly shocked, and different zinc oxide nanoarray structures were obtained by lift-off. In order to study the effect of different thicknesses of zinc oxide on the structure of nanodot arrays, a radio frequency magnetron co-sputtering system was used to deposit undoped zinc oxide films of different thicknesses (100 nm and 300 nm) on the surface of single-layer polystyrene nanospheres. Use a rapid thermal annealing system to perform heat treatment at 700oC for 1 minute in a nitrogen environment, and then use a thermal lift-off process to soak the test piece in an acetone solution and perform appropriate shock cleaning to obtain a zinc oxide nanodot array structure through lift-off. The research uses instruments such as atomic particle microscopy (AFM), Hall measurement, ultraviolet-visible light spectrometer, and photoluminescence measurement system (PL) to measure and analyze surface morphology and photoelectric properties..
563 $a (平裝)
650 # 4 $a structured zinc oxide. $3 1421655
650 # 4 $a roughened zinc oxide. $3 1421654
650 # 4 $a zinc oxide. $3 1015120
650 # 4 $a nanospheres. $3 1328689
650 # 4 $a RF magnetron co-sputtering. $3 1015122
650 # 4 $a 結構化氧化鋅. $3 1421650
650 # 4 $a 粗糙化氧化鋅. $3 1421649
650 # 4 $a 氧化鋅. $3 995852
650 # 4 $a 奈米球. $3 1016594
650 # 4 $a 射頻磁控共濺鍍. $3 996081
856 7 # $u https://handle.ncl.edu.tw/11296/9j75gq $z 電子資源 $2 http