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Triboelectric and Electrostatic MEMS Devices to Enhance Sensing and Actuation Capabilities.

Record Type:	Language materials, manuscript : Monograph/item
Title/Author:	Triboelectric and Electrostatic MEMS Devices to Enhance Sensing and Actuation Capabilities./
Author:	Mousavi, Mohammad.
Description:	1 online resource (261 pages)
Notes:	Source: Dissertations Abstracts International, Volume: 85-04, Section: B.
Contained By:	Dissertations Abstracts International85-04B.
Subject:	Mechanical engineering. -
Online resource:	click for full text (PQDT)
ISBN:	9798380536394

Triboelectric and Electrostatic MEMS Devices to Enhance Sensing and Actuation Capabilities.
Mousavi, Mohammad.

Triboelectric and Electrostatic MEMS Devices to Enhance Sensing and Actuation Capabilities. - 1 online resource (261 pages)

Source: Dissertations Abstracts International, Volume: 85-04, Section: B.

Thesis (Ph.D.)--State University of New York at Binghamton, 2023.

Includes bibliographical references

A significant portion of the industrial sector utilizes MEMS as suitable alternatives for operating electronic devices. These devices offer rapid operational speeds, precise control, heightened sensitivity, minimal contact resistance, negligible insertion loss, an expansive frequency range, capacity for high-temperature operation, and a streamlined fabrication process. The conventional methods of fabricating MEMS allow for cost-effective large-scale production. Furthermore, MEMS components are seamlessly integrated with CMOS wafers, rendering them exceptionally well-suited for industrial applications. MEMS technology encompasses the design of sensors, actuators, and energy harvesters, with sensing, actuation, and energy harvesting within the MEMS field emerging as significant areas of research worldwide. In this context, this dissertation pursues two primary objectives.1. Enhancement of sensing and actuation through electrostatic levitation: This part presents a solution to address issues like failure, stiction, and nonlinearities that restrict their practicality. Extensive research on MEMS switches has pre-dominantly focused on the electrostatic attractive force responsible for triggering the pull-in instability, resulting in the closure and sustained closure of the switch. In the traditional actuation method for MEMS devices, a gap-closing capacitor is employed. Charging the electrodes generates an electrostatic field that propels the upper electrode downward towards the stationary one. Upon surpassing a designated actuation voltage threshold (referred to as pull-in voltage), the mobile electrode loses stability and adheres to the lower electrode, causing the switch to close. Although conventional actuation primarily involves voltage reduction to detach the mobile electrode (thus reopening the switch), any deterioration on the contact surfaces could induce changes in switch behavior, potentially leading to irreversible collapse due to potent surface adhesion forces. Electrostatic levitation introduces an additional actuation approach, originating from the shielding of the lower surface of the mobile electrode and guiding the electrostatic field lines towards the upper surface of the mobile electrode. This generates a repulsive (levitating) force that counteracts the attraction towards the lower electrode. By integrating this supplementary repulsive actuation into the established design, a more comprehensive control over the switching process during both opening and closing stages is achieved. The utilization of levitation force has spurred the development of micro-devices like pressure sensors, accelerometers, micro-mirrors, microphones, and MEMS filters. By incorporating the repulsive force into the gap-closing configuration, this combined mechanism empowers the creation of novel MEMS devices, capable of bi-directional actuation. Activation of the levitation mechanism effectively mitigates stiction, while offering enhanced control over the switch operation. 2. Development and Analysis of Triboelectric Generators for Driving Electro-static MEMS Devices: In the era of rapid Internet of Things (IoT) expansion, the projected count of sensors integrated into IoT systems is anticipated to surpass 200 billion by the year 2025. As a consequence, the significance of sustainable energy sources that eliminate the need for frequent recharge and replacement of energy storage components has escalated. Triboelectric generators have garnered substantial attention due to their ability to deliver high immediate power output, utilize a diverse array of available materials, offer an environmentally friendly and cost-effective fabrication process, and provide adaptable operational modes tailored to specific applications. These generators can capture electrical energy from otherwise wasted mechanical energy present in the surrounding environment. The voltage generation capacity of triboelectric nanogenerators falls within the range of capacitive MEMS actuators. Following an exploration of electrostatic MEMS using parallel-plate and electrostatic levitation techniques, this dissertation introduces triboelectric generators at both meso-scale and micro-scale as apt solutions for powering capacitive (electrostatic) MEMS actuators.

Electronic reproduction.
Ann Arbor, Mich. :
ProQuest,
2024

Mode of access: World Wide Web

ISBN: 9798380536394Subjects--Topical Terms:

557493
Mechanical engineering.
Subjects--Index Terms:

ActuatorsIndex Terms--Genre/Form:

554714
Electronic books.

Triboelectric and Electrostatic MEMS Devices to Enhance Sensing and Actuation Capabilities.
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653 $a Vibration sensors
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