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Benefits of Quadratically Tapered Flexures for Mems Resonators and Gyroscopes.

Record Type:	Language materials, manuscript : Monograph/item
Title/Author:	Benefits of Quadratically Tapered Flexures for Mems Resonators and Gyroscopes./
Author:	Grantham, Brian.
Description:	1 online resource (509 pages)
Notes:	Source: Dissertations Abstracts International, Volume: 85-10, Section: B.
Contained By:	Dissertations Abstracts International85-10B.
Subject:	Electrical engineering. -
Online resource:	click for full text (PQDT)
ISBN:	9798382320632

Benefits of Quadratically Tapered Flexures for Mems Resonators and Gyroscopes.
Grantham, Brian.

Benefits of Quadratically Tapered Flexures for Mems Resonators and Gyroscopes. - 1 online resource (509 pages)

Source: Dissertations Abstracts International, Volume: 85-10, Section: B.

Thesis (Ph.D.)--The University of Alabama in Huntsville, 2024.

Includes bibliographical references

An investigation into the benefits of quadratically tapered flexures for MEMS resonators and gyroscopes is performed and compared to the traditional non-tapered flexure design. Quadratically tapered flexures exhibit constant strain along the outer edge of the flexure whereas non-tapered flexures have significant stress concentration near the base of the flexure. The investigation considers peak stress, thermoelastic damping (TED), nonlinearity, and sensitivity to manufacturing variations. The impact of inside corner fillets on peak stress, TED, and resonant frequency is also investigated. Five new anti-phase lever mechanism (APLM) configurations for resonators and gyroscopes are designed and analyzed using CoventorWare 10. Fabrication experiment results are presented for an array of resonator designs to substantiate the FEA findings. Quadratically tapered flexures are found to reduce stress and thermoelastic damping while maintaining similar sensitivity to manufacturing variations, but at the cost of a slight increase in nonlinearity.

Electronic reproduction.
Ann Arbor, Mich. :
ProQuest,
2024

Mode of access: World Wide Web

ISBN: 9798382320632Subjects--Topical Terms:

596380
Electrical engineering.
Subjects--Index Terms:

Anti-phase leverIndex Terms--Genre/Form:

554714
Electronic books.

Benefits of Quadratically Tapered Flexures for Mems Resonators and Gyroscopes.
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502 $a Thesis (Ph.D.)--The University of Alabama in Huntsville, 2024.
504 $a Includes bibliographical references
520 $a An investigation into the benefits of quadratically tapered flexures for MEMS resonators and gyroscopes is performed and compared to the traditional non-tapered flexure design. Quadratically tapered flexures exhibit constant strain along the outer edge of the flexure whereas non-tapered flexures have significant stress concentration near the base of the flexure. The investigation considers peak stress, thermoelastic damping (TED), nonlinearity, and sensitivity to manufacturing variations. The impact of inside corner fillets on peak stress, TED, and resonant frequency is also investigated. Five new anti-phase lever mechanism (APLM) configurations for resonators and gyroscopes are designed and analyzed using CoventorWare 10. Fabrication experiment results are presented for an array of resonator designs to substantiate the FEA findings. Quadratically tapered flexures are found to reduce stress and thermoelastic damping while maintaining similar sensitivity to manufacturing variations, but at the cost of a slight increase in nonlinearity.
533 $a Electronic reproduction. $b Ann Arbor, Mich. : $c ProQuest, $d 2024
538 $a Mode of access: World Wide Web
650 4 $a Electrical engineering. $3 596380
650 4 $a Computer engineering. $3 569006
650 4 $a Computer science. $3 573171
653 $a Anti-phase lever
653 $a Gyroscope
653 $a Rate sensor
653 $a Tapered flexure
653 $a Thermoelastic damping
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