國立虎尾科技大學 |

Micro Acoustic Metamaterials for Innovative AlN/AlScN-Based RF MEMS.

紀錄類型:	書目-語言資料,手稿 : Monograph/item
正題名/作者:	Micro Acoustic Metamaterials for Innovative AlN/AlScN-Based RF MEMS./
作者:	Zhao, Xuanyi.
面頁冊數:	1 online resource (137 pages)
附註:	Source: Dissertations Abstracts International, Volume: 85-10, Section: B.
Contained By:	Dissertations Abstracts International85-10B.
標題:	Acoustics. -
電子資源:	click for full text (PQDT)
ISBN:	9798382318752

Micro Acoustic Metamaterials for Innovative AlN/AlScN-Based RF MEMS.
Zhao, Xuanyi.

Micro Acoustic Metamaterials for Innovative AlN/AlScN-Based RF MEMS. - 1 online resource (137 pages)

Source: Dissertations Abstracts International, Volume: 85-10, Section: B.

Thesis (Ph.D.)--Northeastern University, 2024.

Includes bibliographical references

We present a new design for AlScN contour-mode-resonators (CMRs) operating in the radiofrequency (RF) range. This design relies on acoustic metamaterials (AM) based lateral anchors to greatly enhance the power handling compared to conventional CMR-designs. Such anchors generate acoustic stopbands that prevent the leakage of piezo-generated acoustic energy from the resonating body into the substrate. The AM anchors reported in this work consist of the same AlScN film as in the CMRs' active region, combined with a periodic array of SiO2 rods. Their use allows a reduction of CMRs' thermal resistance with respect to conventional designs, and enables a significant temperature compensation. As a result, the CMRs with AM anchors reported in this work show a ∼60% reduction in their Duffing coefficient with respect to conventional designs with fully-etched lateral sides, hence an improved linearity. Furthermore, when used to set the output frequency of high-power feedback loop oscillators, the CMRs with the AM anchors reported here enable a lower phase-noise compared to what achievable when employing the conventional counterparts.

Electronic reproduction.
Ann Arbor, Mich. :
ProQuest,
2024

Mode of access: World Wide Web

ISBN: 9798382318752Subjects--Topical Terms:

670692
Acoustics.
Subjects--Index Terms:

Contour-mode-resonatorsIndex Terms--Genre/Form:

554714
Electronic books.

Micro Acoustic Metamaterials for Innovative AlN/AlScN-Based RF MEMS.
LDR:02536ntm a22003977 4500 001 1148048
005 20240916070012.5
006 m o d
007 cr bn ---uuuuu
008 250605s2024 xx obm 000 0 eng d
020 $a 9798382318752
035 $a (MiAaPQ)AAI31241535
035 $a AAI31241535
040 $a MiAaPQ $b eng $c MiAaPQ $d NTU
100 1 $a Zhao, Xuanyi. $3 1473926
245 1 0 $a Micro Acoustic Metamaterials for Innovative AlN/AlScN-Based RF MEMS.
264 0 $c 2024
300 $a 1 online resource (137 pages)
336 $a text $b txt $2 rdacontent
337 $a computer $b c $2 rdamedia
338 $a online resource $b cr $2 rdacarrier
500 $a Source: Dissertations Abstracts International, Volume: 85-10, Section: B.
500 $a Advisor: Cassella, Cristian.
502 $a Thesis (Ph.D.)--Northeastern University, 2024.
504 $a Includes bibliographical references
520 $a We present a new design for AlScN contour-mode-resonators (CMRs) operating in the radiofrequency (RF) range. This design relies on acoustic metamaterials (AM) based lateral anchors to greatly enhance the power handling compared to conventional CMR-designs. Such anchors generate acoustic stopbands that prevent the leakage of piezo-generated acoustic energy from the resonating body into the substrate. The AM anchors reported in this work consist of the same AlScN film as in the CMRs' active region, combined with a periodic array of SiO2 rods. Their use allows a reduction of CMRs' thermal resistance with respect to conventional designs, and enables a significant temperature compensation. As a result, the CMRs with AM anchors reported in this work show a ∼60% reduction in their Duffing coefficient with respect to conventional designs with fully-etched lateral sides, hence an improved linearity. Furthermore, when used to set the output frequency of high-power feedback loop oscillators, the CMRs with the AM anchors reported here enable a lower phase-noise compared to what achievable when employing the conventional counterparts.
533 $a Electronic reproduction. $b Ann Arbor, Mich. : $c ProQuest, $d 2024
538 $a Mode of access: World Wide Web
650 4 $a Acoustics. $3 670692
650 4 $a Materials science. $3 557839
650 4 $a Electrical engineering. $3 596380
653 $a Contour-mode-resonators
653 $a Radiofrequency range
653 $a Acoustic stopbands
653 $a Fully-etched lateral sides
653 $a Lower phase-noise
655 7 $a Electronic books. $2 local $3 554714
690 $a 0544
690 $a 0794
690 $a 0986
710 2 $a Northeastern University. $b Electrical and Computer Engineering. $3 1182193
710 2 $a ProQuest Information and Learning Co. $3 1178819
773 0 $t Dissertations Abstracts International $g 85-10B.
856 4 0 $u http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=31241535 $z click for full text (PQDT)