國立虎尾科技大學 |

Fabrication and Characterization of Thin Film Pressure Sensors using Novel Materials.

Record Type:	Language materials, manuscript : Monograph/item
Title/Author:	Fabrication and Characterization of Thin Film Pressure Sensors using Novel Materials./
Author:	Samoei, Victor.
Description:	1 online resource (98 pages)
Notes:	Source: Masters Abstracts International, Volume: 83-05.
Contained By:	Masters Abstracts International83-05.
Subject:	Engineering. -
Online resource:	click for full text (PQDT)
ISBN:	9798460404544

Fabrication and Characterization of Thin Film Pressure Sensors using Novel Materials.
Samoei, Victor.

Fabrication and Characterization of Thin Film Pressure Sensors using Novel Materials. - 1 online resource (98 pages)

Source: Masters Abstracts International, Volume: 83-05.

Thesis (M.S.)--The University of Toledo, 2020.

Includes bibliographical references

Thin-film pressure sensors have received widespread attention in recent times due to its ease of manufacture, characterization, and fatigue strength. Commercial fabrication of these sensors is inexpensive and compatible with the current manufacturing technologies. It has been found that the sensitivity of the flexible pressure sensor depends on the sensing pressure, the microstructural dispersion of nanoparticles, and the compatibility of the binder and the nanoparticles. The binder/particle dispersion should be such that it facilitates the formation of a greater number of conduction paths with a slight change in sensing pressure.The objective of this thesis includes the fabrication and characterization of a thin-film pressure sensor using different novel materials. The first material to be investigated was ZnO. ZnO thin-film materials that have received a great deal of attention due to its unique properties of being a semiconductor with wide bandgap and piezoelectric effect. The sensor characteristic of ZnO was compared with barium-titanate (BaTiO3) Gallium arsenic (GaAs) and Polyvinylidene fluoride (PVDF).The second material to be investigated was aluminum-doped zinc oxide (AZO). AZO has attracted a great deal of attention in many applications because of its nontoxicity, abundancy, and lower cost than other materials such as indium tin oxide (ITO). The AZO films were deposited on polyethylene (PE) substrates by a radiofrequency (rf) magnetron sputtering method. The piezoresistive sensor was tested for different pressures in vacuum and gage pressure conditions. The response characteristics indicated that resistance increased with the bending of the AZO layer in both compressive and tensile operation modes. The sensor characteristics exhibited that the AZO piezoresistive sensor can be used to measure ambient pressure quantitatively. This investigation indicated that AZO can be used as an alternative material for the fabrication of pressure sensors.Lastly, the materials that were investigated are carbon black/ Poly (vinylidene fluoride) (CB/PVDF), graphene/PMMA, and graphene/PVDF composites. The conductive CB/PVDF material was prepared by the wet-cast method and deposited into a flexible polyethylene (PE) substrate, while the graphene composites were prepared by the solvent cast method. The surface morphology, crystal structure, and material properties were studied using SEM and X-ray diffraction methods. Sensitivity, response time, and recovery time were analyzed by testing the sample in the deferent pressure range and vibration modes. The repeatability and reproducibility characteristics of the sensor were studied and found that the sensor exhibits excellent characteristics. The sensors were subjected to different loading/unloading pressures. The resistance of the sensor remained stable indicating that the sensor had a high degree of reproducibility.

Electronic reproduction.
Ann Arbor, Mich. :
ProQuest,
2024

Mode of access: World Wide Web

ISBN: 9798460404544Subjects--Topical Terms:

561152
Engineering.
Subjects--Index Terms:

Pressure sensorIndex Terms--Genre/Form:

554714
Electronic books.

Fabrication and Characterization of Thin Film Pressure Sensors using Novel Materials.
LDR:04325ntm a22004097 4500 001 1148460
005 20240924101518.5
006 m o d
007 cr bn ---uuuuu
008 250605s2020 xx obm 000 0 eng d
020 $a 9798460404544
035 $a (MiAaPQ)AAI28830592
035 $a (MiAaPQ)OhioLINKtoledo1596762165322848
035 $a AAI28830592
040 $a MiAaPQ $b eng $c MiAaPQ $d NTU
100 1 $a Samoei, Victor. $3 1474423
245 1 0 $a Fabrication and Characterization of Thin Film Pressure Sensors using Novel Materials.
264 0 $c 2020
300 $a 1 online resource (98 pages)
336 $a text $b txt $2 rdacontent
337 $a computer $b c $2 rdamedia
338 $a online resource $b cr $2 rdacarrier
500 $a Source: Masters Abstracts International, Volume: 83-05.
502 $a Thesis (M.S.)--The University of Toledo, 2020.
504 $a Includes bibliographical references
520 $a Thin-film pressure sensors have received widespread attention in recent times due to its ease of manufacture, characterization, and fatigue strength. Commercial fabrication of these sensors is inexpensive and compatible with the current manufacturing technologies. It has been found that the sensitivity of the flexible pressure sensor depends on the sensing pressure, the microstructural dispersion of nanoparticles, and the compatibility of the binder and the nanoparticles. The binder/particle dispersion should be such that it facilitates the formation of a greater number of conduction paths with a slight change in sensing pressure.The objective of this thesis includes the fabrication and characterization of a thin-film pressure sensor using different novel materials. The first material to be investigated was ZnO. ZnO thin-film materials that have received a great deal of attention due to its unique properties of being a semiconductor with wide bandgap and piezoelectric effect. The sensor characteristic of ZnO was compared with barium-titanate (BaTiO3) Gallium arsenic (GaAs) and Polyvinylidene fluoride (PVDF).The second material to be investigated was aluminum-doped zinc oxide (AZO). AZO has attracted a great deal of attention in many applications because of its nontoxicity, abundancy, and lower cost than other materials such as indium tin oxide (ITO). The AZO films were deposited on polyethylene (PE) substrates by a radiofrequency (rf) magnetron sputtering method. The piezoresistive sensor was tested for different pressures in vacuum and gage pressure conditions. The response characteristics indicated that resistance increased with the bending of the AZO layer in both compressive and tensile operation modes. The sensor characteristics exhibited that the AZO piezoresistive sensor can be used to measure ambient pressure quantitatively. This investigation indicated that AZO can be used as an alternative material for the fabrication of pressure sensors.Lastly, the materials that were investigated are carbon black/ Poly (vinylidene fluoride) (CB/PVDF), graphene/PMMA, and graphene/PVDF composites. The conductive CB/PVDF material was prepared by the wet-cast method and deposited into a flexible polyethylene (PE) substrate, while the graphene composites were prepared by the solvent cast method. The surface morphology, crystal structure, and material properties were studied using SEM and X-ray diffraction methods. Sensitivity, response time, and recovery time were analyzed by testing the sample in the deferent pressure range and vibration modes. The repeatability and reproducibility characteristics of the sensor were studied and found that the sensor exhibits excellent characteristics. The sensors were subjected to different loading/unloading pressures. The resistance of the sensor remained stable indicating that the sensor had a high degree of reproducibility.
533 $a Electronic reproduction. $b Ann Arbor, Mich. : $c ProQuest, $d 2024
538 $a Mode of access: World Wide Web
650 4 $a Engineering. $3 561152
650 4 $a Mechanical engineering. $3 557493
650 4 $a Materials science. $3 557839
653 $a Pressure sensor
653 $a Microelectromechanical systems
653 $a Polymers
653 $a Aluminum-doped zinc oxide
653 $a Carbon black
653 $a Polyvinylidene fluoride
655 7 $a Electronic books. $2 local $3 554714
690 $a 0537
690 $a 0548
690 $a 0794
710 2 $a ProQuest Information and Learning Co. $3 1178819
710 2 $a The University of Toledo. $b Mechanical Engineering. $3 1178964
773 0 $t Masters Abstracts International $g 83-05.
856 4 0 $u http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=28830592 $z click for full text (PQDT)