國立虎尾科技大學 |

Active Vibration Suppression for Wafer Transfer Systems in Semiconductor Fabrication Plants.

紀錄類型:	書目-語言資料,手稿 : Monograph/item
正題名/作者:	Active Vibration Suppression for Wafer Transfer Systems in Semiconductor Fabrication Plants./
作者:	Qiu, Jiajie.
面頁冊數:	1 online resource (91 pages)
附註:	Source: Masters Abstracts International, Volume: 85-10.
Contained By:	Masters Abstracts International85-10.
標題:	Systems science. -
電子資源:	click for full text (PQDT)
ISBN:	9798381955071

Active Vibration Suppression for Wafer Transfer Systems in Semiconductor Fabrication Plants.
Qiu, Jiajie.

Active Vibration Suppression for Wafer Transfer Systems in Semiconductor Fabrication Plants. - 1 online resource (91 pages)

Source: Masters Abstracts International, Volume: 85-10.

Thesis (M.S.)--Massachusetts Institute of Technology, 2023.

Includes bibliographical references

Vibration suppression is critical in precision mechatronic systems for nanofabrication. In semiconductor plants, automated wafer handling is performed by Overhead Hoist Transport (OHT) vehicles that transport wafers in front opening unified pods (FOUPs). When the wafers are transported in FOUPs, semiconductor chips are at risk of damage by excited small particles due to mechanical vibration, especially if such particles land on the critical area of the wafers. To minimize the vibration excitation force transferred to the FOUP, this thesis focuses on active suppression of the FOUP vibrations to improve the production yield. However, two primary challenges make this problem difficult. First, the OHT vehicle and the FOUP keep traveling, thus the target system is floating with no external anchoring point as a momentum source for control efforts. Second, no sensor attachment is permitted on mass-production FOUPs, which makes feedback control more challenging without measurement. To address the challenges and achieve the goal of reducing FOUP acceleration peaks, an inertia-based counterbalancing system is developed. To validate this system, a customized testbed is built to replicate the acceleration profile of the OHT vehicle in both travel and lateral axes. Additionally, an active vibration suppression system is designed to generate a controllable force on the hand unit. System modeling and identification are conducted using simulation and experiment to identify the system dynamics. Finally, a Disturbance Observer-Based Controller (DOBC) is developed and implemented on the hardware. The experimental results show that the DOBC achieves 38 percent reduction of OHT hand unit vibration and 42 percent reduction of FOUP vibration in the OHT travel direction. Furthermore, the proposed method successfully reduces the multi-axis FOUP-level acceleration peaks, further confirming the effectiveness of the proposed method.

Electronic reproduction.
Ann Arbor, Mich. :
ProQuest,
2024

Mode of access: World Wide Web

ISBN: 9798381955071Subjects--Topical Terms:

1148479
Systems science.
Subjects--Index Terms:

Overhead Hoist TransportIndex Terms--Genre/Form:

554714
Electronic books.

Active Vibration Suppression for Wafer Transfer Systems in Semiconductor Fabrication Plants.
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