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Nano-CMOS gate dielectric engineering
Record Type:
Language materials, printed : Monograph/item
Title/Author:
Nano-CMOS gate dielectric engineering/ Hei Wong.
Author:
Wong, Hei.
Published:
Boca Raton, FL :CRC Press, : ©2011.,
Description:
1 online resource (xiv, 234 p.) :ill. :
Subject:
Metal oxide semiconductors, Complementary - Design and construction. -
Online resource:
https://www.taylorfrancis.com/books/9781315217390
ISBN:
1439849609 (electronic bk.)
Nano-CMOS gate dielectric engineering
Wong, Hei.
Nano-CMOS gate dielectric engineering
[electronic resource] /Hei Wong. - Boca Raton, FL :CRC Press,©2011. - 1 online resource (xiv, 234 p.) :ill.
Includes bibliographical references and index.
1. Overview of CMOS technology -- 2. High-k dielectrics -- 3. Complex forms of high-k oxides -- 4. Dielectric interfaces -- 5. Impacts on device operation -- 6. Fabrication issues -- 7. Conclusions.
ISBN: 1439849609 (electronic bk.)Subjects--Topical Terms:
564465
Metal oxide semiconductors, Complementary
--Design and construction.
LC Class. No.: TK7871.99.M44 / W66 2011
Dewey Class. No.: 621.3815/28
Nano-CMOS gate dielectric engineering
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Hei Wong.
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Includes bibliographical references and index.
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1. Overview of CMOS technology -- 2. High-k dielectrics -- 3. Complex forms of high-k oxides -- 4. Dielectric interfaces -- 5. Impacts on device operation -- 6. Fabrication issues -- 7. Conclusions.
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Metal oxide semiconductors, Complementary
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https://www.taylorfrancis.com/books/9781315217390
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