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以閉磁場異質雙陰極高功率脈衝磁控濺鍍製備合金薄膜之研究 = = Depo...

林煜喆

以閉磁場異質雙陰極高功率脈衝磁控濺鍍製備合金薄膜之研究 = = Deposition of alloy films synthesized using the closed magnetic field heterogeneous dual-cathodes high-power impulse magnetron sputtering /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	以閉磁場異質雙陰極高功率脈衝磁控濺鍍製備合金薄膜之研究 =/ 林煜喆.
Reminder of title:	Deposition of alloy films synthesized using the closed magnetic field heterogeneous dual-cathodes high-power impulse magnetron sputtering /
remainder title:	Deposition of alloy films synthesized using the closed magnetic field heterogeneous dual-cathodes high-power impulse magnetron sputtering.
Author:	林煜喆
Published:	雲林縣 :國立虎尾科技大學 , : 民114.05.,
Description:	[12], 104面 :圖, 表 ; : 30公分.;
Notes:	指導教授: 劉文忠, 郭晉全.
Subject:	高功率脈衝磁控濺鍍. -
Online resource:	電子資源

以閉磁場異質雙陰極高功率脈衝磁控濺鍍製備合金薄膜之研究 = = Deposition of alloy films synthesized using the closed magnetic field heterogeneous dual-cathodes high-power impulse magnetron sputtering /
林煜喆

以閉磁場異質雙陰極高功率脈衝磁控濺鍍製備合金薄膜之研究 =Deposition of alloy films synthesized using the closed magnetic field heterogeneous dual-cathodes high-power impulse magnetron sputtering /Deposition of alloy films synthesized using the closed magnetic field heterogeneous dual-cathodes high-power impulse magnetron sputtering.林煜喆. - 初版. - 雲林縣 :國立虎尾科技大學 ,民114.05. - [12], 104面 :圖, 表 ;30公分.

指導教授: 劉文忠, 郭晉全.

博士論文--國立虎尾科技大學動力機械工程系機械與機電工程博士班.

含參考書目.

(平裝).Subjects--Topical Terms:

1026675
高功率脈衝磁控濺鍍.

以閉磁場異質雙陰極高功率脈衝磁控濺鍍製備合金薄膜之研究 = = Deposition of alloy films synthesized using the closed magnetic field heterogeneous dual-cathodes high-power impulse magnetron sputtering /
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245 1 0 $a 以閉磁場異質雙陰極高功率脈衝磁控濺鍍製備合金薄膜之研究 = $b Deposition of alloy films synthesized using the closed magnetic field heterogeneous dual-cathodes high-power impulse magnetron sputtering / $c 林煜喆.
246 1 1 $a Deposition of alloy films synthesized using the closed magnetic field heterogeneous dual-cathodes high-power impulse magnetron sputtering.
250 $a 初版.
260 # $a 雲林縣 : $b 國立虎尾科技大學 , $c 民114.05.
300 $a [12], 104面 : $b 圖, 表 ; $c 30公分.
500 $a 指導教授: 劉文忠, 郭晉全.
500 $a 學年度: 113.
502 $a 博士論文--國立虎尾科技大學動力機械工程系機械與機電工程博士班.
504 $a 含參考書目.
563 $a (平裝).
650 # 4 $a 高功率脈衝磁控濺鍍. $3 1026675
650 # 4 $a 閉磁場雙陰極磁控. $3 1490131
650 # 4 $a 脈衝時間差. $3 1490132
650 # 4 $a 鈦. $3 1150804
650 # 4 $a 鋯. $3 1083661
650 # 4 $a High-power impulse magnetron sputtering. $3 1490133
650 # 4 $a Closed-field dual magnetron. $3 1490134
650 # 4 $a Pulse time offset. $3 1490135
650 # 4 $a Titanium. $3 998043
650 # 4 $a Zirconium. $3 674452
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