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製程偏壓與成份設計對氮化鈦矽薄膜結構及循環衝擊疲勞性能之影響 = = E...

李柏均

製程偏壓與成份設計對氮化鈦矽薄膜結構及循環衝擊疲勞性能之影響 = = Effects of Process Bias and Compositional Design on the Structure and Cyclic Impact Fatigue properties of TiSiN Coatings /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	製程偏壓與成份設計對氮化鈦矽薄膜結構及循環衝擊疲勞性能之影響 =/ 李柏均.
Reminder of title:	Effects of Process Bias and Compositional Design on the Structure and Cyclic Impact Fatigue properties of TiSiN Coatings /
remainder title:	Effects of Process Bias and Compositional Design on the Structure and Cyclic Impact Fatigue properties of TiSiN Coatings.
Author:	李柏均
Published:	雲林縣 :國立虎尾科技大學 , : 民114.07.,
Description:	[16], 119面 :圖, 表 ; : 30公分.;
Notes:	指導教授: 張銀祐.
Subject:	陰極電弧. -
Online resource:	電子資源

製程偏壓與成份設計對氮化鈦矽薄膜結構及循環衝擊疲勞性能之影響 = = Effects of Process Bias and Compositional Design on the Structure and Cyclic Impact Fatigue properties of TiSiN Coatings /
李柏均

製程偏壓與成份設計對氮化鈦矽薄膜結構及循環衝擊疲勞性能之影響 =Effects of Process Bias and Compositional Design on the Structure and Cyclic Impact Fatigue properties of TiSiN Coatings /Effects of Process Bias and Compositional Design on the Structure and Cyclic Impact Fatigue properties of TiSiN Coatings.李柏均. - 初版. - 雲林縣 :國立虎尾科技大學 ,民114.07. - [16], 119面 :圖, 表 ;30公分.

指導教授: 張銀祐.

碩士論文--國立虎尾科技大學機械與電腦輔助工程系碩士班.

參考書目.

(平裝).Subjects--Topical Terms:

1494527
陰極電弧.

製程偏壓與成份設計對氮化鈦矽薄膜結構及循環衝擊疲勞性能之影響 = = Effects of Process Bias and Compositional Design on the Structure and Cyclic Impact Fatigue properties of TiSiN Coatings /
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