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Micro Electro Mechanical System (MEMs) technology for multifaceted applications

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Micro Electro Mechanical System (MEMs) technology for multifaceted applications/ by Kamaljeet Singh, Ayan Karmakar.
Author:	Singh, Kamaljeet.
other author:	Karmakar, Ayan.
Published:	Singapore :Springer Nature Singapore : : 2025.,
Description:	xx, 160 p. :ill., digital ; : 24 cm.;
Contained By:	Springer Nature eBook
Subject:	Microelectromechanical systems - Industrial applications. -
Online resource:	https://doi.org/10.1007/978-981-96-6162-6
ISBN:	9789819661626

Micro Electro Mechanical System (MEMs) technology for multifaceted applications
Singh, Kamaljeet.

Micro Electro Mechanical System (MEMs) technology for multifaceted applications[electronic resource] /by Kamaljeet Singh, Ayan Karmakar. - Singapore :Springer Nature Singapore :2025. - xx, 160 p. :ill., digital ;24 cm.

Role of contamination -- Wafer Criteria -- Micromachined Sensors: An overview -- Fabrication -- Thin film stress -- Micro devices: Planar Heater -- Critical aspects.

This book details simple methodology for the realization of the practical micro devices employed in general applications. The book brings out practical concept along with process details associated with the device realization. The micro device fabrication technique is similar to MEMS and the application and methodologies are compatible to standard CMOS technologies. This book covers basic of wafer, general micro devices such as micro-heater, temperature sensor, humidity sensor, gas sensor, pyro-device along with associated characterization, integration and assembly aspects. This book provides basic overview and discusses practical aspects with characterization data. This book is targeted for the beginners and researchers providing insight into the practical aspects of this technology.

ISBN: 9789819661626

Standard No.: 10.1007/978-981-96-6162-6doiSubjects--Topical Terms:

1028571
Microelectromechanical systems
--Industrial applications.

LC Class. No.: TK7875

Dewey Class. No.: 621.381

Micro Electro Mechanical System (MEMs) technology for multifaceted applications
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