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Micro Electro Mechanical System (MEMs) technology for multifaceted applications

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Micro Electro Mechanical System (MEMs) technology for multifaceted applications/ by Kamaljeet Singh, Ayan Karmakar.
作者:	Singh, Kamaljeet.
其他作者:	Karmakar, Ayan.
出版者:	Singapore :Springer Nature Singapore : : 2025.,
面頁冊數:	xx, 160 p. :ill., digital ; : 24 cm.;
Contained By:	Springer Nature eBook
標題:	Microelectromechanical systems - Industrial applications. -
電子資源:	https://doi.org/10.1007/978-981-96-6162-6
ISBN:	9789819661626

Micro Electro Mechanical System (MEMs) technology for multifaceted applications
Singh, Kamaljeet.

Micro Electro Mechanical System (MEMs) technology for multifaceted applications[electronic resource] /by Kamaljeet Singh, Ayan Karmakar. - Singapore :Springer Nature Singapore :2025. - xx, 160 p. :ill., digital ;24 cm.

Role of contamination -- Wafer Criteria -- Micromachined Sensors: An overview -- Fabrication -- Thin film stress -- Micro devices: Planar Heater -- Critical aspects.

This book details simple methodology for the realization of the practical micro devices employed in general applications. The book brings out practical concept along with process details associated with the device realization. The micro device fabrication technique is similar to MEMS and the application and methodologies are compatible to standard CMOS technologies. This book covers basic of wafer, general micro devices such as micro-heater, temperature sensor, humidity sensor, gas sensor, pyro-device along with associated characterization, integration and assembly aspects. This book provides basic overview and discusses practical aspects with characterization data. This book is targeted for the beginners and researchers providing insight into the practical aspects of this technology.

ISBN: 9789819661626

Standard No.: 10.1007/978-981-96-6162-6doiSubjects--Topical Terms:

1028571
Microelectromechanical systems
--Industrial applications.

LC Class. No.: TK7875

Dewey Class. No.: 621.381

Micro Electro Mechanical System (MEMs) technology for multifaceted applications
LDR:01977nam a22003255a 4500 001 1172457
003 DE-He213
005 20250721130857.0
006 m d
007 cr nn 008maaau
008 260625s2025 si s 0 eng d
020 $a 9789819661626 $q (electronic bk.)
020 $a 9789819661619 $q (paper)
024 7 $a 10.1007/978-981-96-6162-6 $2 doi
035 $a 978-981-96-6162-6
040 $a GP $c GP
041 0 $a eng
050 4 $a TK7875
072 7 $a TGB $2 bicssc
072 7 $a TEC009070 $2 bisacsh
072 7 $a TGB $2 thema
082 0 4 $a 621.381 $2 23
090 $a TK7875 $b .S617 2025
100 1 $a Singh, Kamaljeet. $3 1227145
245 1 0 $a Micro Electro Mechanical System (MEMs) technology for multifaceted applications $h [electronic resource] / $c by Kamaljeet Singh, Ayan Karmakar.
260 $a Singapore : $c 2025. $b Springer Nature Singapore : $b Imprint: Springer,
300 $a xx, 160 p. : $b ill., digital ; $c 24 cm.
505 0 $a Role of contamination -- Wafer Criteria -- Micromachined Sensors: An overview -- Fabrication -- Thin film stress -- Micro devices: Planar Heater -- Critical aspects.
520 $a This book details simple methodology for the realization of the practical micro devices employed in general applications. The book brings out practical concept along with process details associated with the device realization. The micro device fabrication technique is similar to MEMS and the application and methodologies are compatible to standard CMOS technologies. This book covers basic of wafer, general micro devices such as micro-heater, temperature sensor, humidity sensor, gas sensor, pyro-device along with associated characterization, integration and assembly aspects. This book provides basic overview and discusses practical aspects with characterization data. This book is targeted for the beginners and researchers providing insight into the practical aspects of this technology.
650 0 $a Microelectromechanical systems $x Industrial applications. $3 1028571
650 1 4 $a Mechanical Engineering. $3 670827
650 2 4 $a Mechanical Power Engineering. $3 1365892
650 2 4 $a Electrical Power Engineering. $3 1365891
700 1 $a Karmakar, Ayan. $3 1227144
710 2 $a SpringerLink (Online service) $3 593884
773 0 $t Springer Nature eBook
856 4 0 $u https://doi.org/10.1007/978-981-96-6162-6
950 $a Mechanical Engineering (R0) (SpringerNature-85268)