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Polymers for microelectronics : resi...

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American Chemical Society

Polymers for microelectronics : resists and dielectrics

Record Type:	Language materials, printed : monographic
Title Information:	resists and dielectrics
Alternative Intellectual Responsibility:	ThompsonL. F, 1944
Alternative Intellectual Responsibility:	WillsonC. G, 1939
Alternative Intellectual Responsibility:	TagawaSeiichi,
Alternative Intellectual Responsibility:	American Chemical Society
Place of Publication:	Washington, DC
Published:	American Chemical Society; American Chemical Society;
Year of Publication:	1994
Description:	xii, 571 pill : 24 cm;
Series:	ACS symposium series
Subject:	Microelectronics - Materials -
Notes:	"Developed from a symposium sponsored by the Division of Polymeri Materials: Science and Engineering, Inc., of the American Chemical Society and the Society of Polymer Science, Japan, at the 203rd National Meeting of the American Chemical Society, San Francisco, California, April 5-10, 1992."
ISBN:	0841227217

Polymers for microelectronics : resists and dielectrics
Polymers for microelectronics : resists and dielectrics / Larry F. Thompson, editor, C. Grant Willson, editor, Seiichi Tagawa, editor - Washington, DC : American Chemical Society, 1994. - xii, 571 p ; ill ; 24 cm. - (ACS symposium series ; 537).
"Developed from a symposium sponsored by the Division of Polymeri Materials: Science and Engineering, Inc., of the American Chemical Society and the Society of Polymer Science, Japan, at the 203rd National Meeting of the American Chemical Society, San Francisco, California, April 5-10, 1992.".
Includes bibliographical references and indexes.
ISBN 0841227217
Microelectronics -- Materials

Thompson, L. F

Polymers for microelectronics : resists and dielectrics
LDR:01139cam 2200229 i 450 001 437232
009 a93033955 //r94
010 1 $a 0841227217 $b (hard)
100 $a 20070327d1994 m y0engy01 b
101 0 $a eng
200 1 $a Polymers for microelectronics $e resists and dielectrics $f Larry F. Thompson, editor, C. Grant Willson, editor, Seiichi Tagawa, editor
210 $a Washington, DC $c American Chemical Society $d 1994 $c American Chemical Society
215 1 $a xii, 571 p $c ill $d 24 cm
225 0 $a ACS symposium series $v 537 $x 0097-6156
300 $a "Developed from a symposium sponsored by the Division of Polymeri Materials: Science and Engineering, Inc., of the American Chemical Society and the Society of Polymer Science, Japan, at the 203rd National Meeting of the American Chemical Society, San Francisco, California, April 5-10, 1992."
320 $a Includes bibliographical references and indexes
606 $2 lc $a Microelectronics $x Materials $3 416505
676 $a 621.3815/31 $v 20
676 $a 621.381531 $b P783
680 $a TK7871.15.P6 $b P628 1994
701 $a Thompson $b L. F $f 1944 $3 416574
701 $a Willson $b C. G $f 1939 $3 416575
701 $a Tagawa $b Seiichi $3 416576
711 $a American Chemical Society $b Task Force on Laboratory Waste Management $3 414079
801 0 $b DLC
801 0 $a cw $b BIB $c 19980420
801 1 $a cw $b national library $c 19980420
801 0 $a cw $b 國立國立虎尾科技大學圖書館 $c 19980507 $g CCR

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621.381531 P783 1994

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