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Run-to-run control in semiconductor ...

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Del Castillo, Enrique

Run-to-run control in semiconductor manufacturing

Record Type:	Language materials, printed : monographic
Secondary Intellectual Responsibility:	MoyneJames,
Secondary Intellectual Responsibility:	Del CastilloEnrique,
Secondary Intellectual Responsibility:	HurwitzArnon Max,
Place of Publication:	Boca Raton
Published:	CRC Press;
Year of Publication:	2001
Description:	348 pill : 24 cm;
Subject:	Semiconductors - Design and construction -
Subject:	Semiconductor industry - Production control -
Subject:	Electronic packaging -
Subject:	Production management -
ISBN:	0849311780

Run-to-run control in semiconductor manufacturing
Run-to-run control in semiconductor manufacturing / edited by James Moyne, Enrique del Castillo, Arnon Max Hurwitz - Boca Raton : CRC Press, 2001. - 348 p ; ill ; 24 cm.
Includes bibliographical references and index.
ISBN 0849311780
SemiconductorsSemiconductor industryElectronic packagingProduction management -- Design and construction -- Production control

Moyne, James

Run-to-run control in semiconductor manufacturing
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210 $a Boca Raton $c CRC Press $d 2001
215 0 $a 348 p $c ill $d 24 cm
320 $a Includes bibliographical references and index
606 $a Semiconductors $x Design and construction $3 422820 $2 lc $3 728899
606 $a Semiconductor industry $x Production control $3 433620 $2 lc $3 736325
606 $a Electronic packaging $3 414565 $2 lc $3 736156
606 $a Production management $3 396385 $2 lc $3 723859
676 $a 621.3815/2 $v 21
680 $a TK7871.85 $b R863 2001
702 $a Moyne $b James $3 433617
702 $a Del Castillo $b Enrique $3 433618
702 $a Hurwitz $b Arnon Max $3 433619
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621.38152 R939 2001

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