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Nano- and microelectromechanical sys...

Lyshevski, Sergey Edward

Nano- and microelectromechanical systems : fundamentals of nano- and microengineering

Record Type:	Language materials, printed : monographic
Title Information:	fundamentals of nano- and microengineering
Author:	LyshevskiSergey Edward,
Place of Publication:	Boca Raton
Published:	CRC Press;
Year of Publication:	c2001
Description:	338 pill : 25 cm;
Series:
Subject:	Microelectromechanical systems -

Nano- and microelectromechanical systems : fundamentals of nano- and microengineering
Lyshevski, Sergey Edward

Nano- and microelectromechanical systems : fundamentals of nano- and microengineering / Sergey Edward Lyshevski - Boca Raton : CRC Press, c2001. - 338 p ; ill ; 25 cm.
Includes bibliographical references and index.
ISBN 0849309166
Microelectromechanical systems

Nano- and microelectromechanical systems : fundamentals of nano- and microengineering
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210 $a Boca Raton $c CRC Press $d c2001
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