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Silicon Wafer Bonding Technology : F...

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Silicon Wafer Bonding Technology : For VLSI and MEMS Applications

Record Type:	Language materials, printed : monographic
Title Information:	For VLSI and MEMS Applications
Secondary Intellectual Responsibility:	IyerSubramanian S,
Secondary Intellectual Responsibility:	Auberton-HerveAndre J,
Alternative Intellectual Responsibility:	Institution of Electrical Engineers
Place of Publication:	London
Published:	Institution of Electrical Engineers; Institution of Electrical Engineers;
Year of Publication:	c2002
Description:	xxv, 149 pill : 25 cm;
Series:
Subject:	Silicon-on-insulator technology -
Subject:	Integrated circuits - Very large scale integration -
Subject:	Microelectromechanical systems -
ISBN:	0852960395

Silicon Wafer Bonding Technology : For VLSI and MEMS Applications
Silicon Wafer Bonding Technology : For VLSI and MEMS Applications / edited by Subramanian S. Iyer and Andre J. Auberton-Herve - London : Institution of Electrical Engineers, c2002. - xxv, 149 p ; ill ; 25 cm. - ( ; no. 1).
Includes bibliographical references and index.
ISBN 0852960395
Silicon-on-insulator technologyIntegrated circuitsMicroelectromechanical systems -- Very large scale integration

Iyer, Subramanian S

Silicon Wafer Bonding Technology : For VLSI and MEMS Applications
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200 1 $a Silicon Wafer Bonding Technology $e For VLSI and MEMS Applications $f edited by Subramanian S. Iyer and Andre J. Auberton-Herve
210 $a London $c Institution of Electrical Engineers $d c2002 $c Institution of Electrical Engineers
215 0 $a xxv, 149 p $c ill $d 25 cm
225 E $M ISSPSERS $v no. 1
320 $a Includes bibliographical references and index
606 $2 lc $a Silicon-on-insulator technology $3 436908
606 $2 lc $a Integrated circuits $x Very large scale integration $3 392457
606 $2 lc $a Microelectromechanical systems $3 428971
676 $a 621.38152 $v 21
702 $a Iyer $b Subramanian S $3 484903
702 $a Auberton-Herve $b Andre J $3 484904
711 $a Institution of Electrical Engineers $3 421926
711 $a INSPEC (Information service) $b EMIS Group $3 484905
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801 0 $a cw $b BIB $c 20070124
801 1 $a cw $b 虎尾科技大學圖書館 $c 20070124

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E027050

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621.38152 S583 2002

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