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MEMS/MOEMS packaging : concepts, des...

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Gilleo, Ken

MEMS/MOEMS packaging : concepts, designs, materials, and processes

Record Type:	Language materials, printed : monographic
Title Information:	concepts, designs, materials, and processes
Author:	GilleoKen,
Place of Publication:	New York
Published:	McGraw-Hill;
Year of Publication:	c2005
Description:	xiii, 220 pill : 24 cm;
Series:
Subject:	Microelectronic packaging -
Subject:	Microelectromechanical systems -
Subject:	Optoelectronic devices -
ISBN:	0071455566

MEMS/MOEMS packaging : concepts, designs, materials, and processes
Gilleo, Ken

MEMS/MOEMS packaging : concepts, designs, materials, and processes / Ken Gilleo - New York : McGraw-Hill, c2005. - xiii, 220 p ; ill ; 24 cm.
Includes bibliographical references (p. 203-213) and index.
ISBN 0071455566
Microelectronic packagingMicroelectromechanical systemsOptoelectronic devices

MEMS/MOEMS packaging : concepts, designs, materials, and processes
LDR:00670cam 2200217 i 450 001 493398
005 20101024065529.0
009 a(OCoLC)ocm60500540
009 a2005049594
010 1 $5 ,187 $a 0071455566 $b (hbk.) $d NT
100 $a 20080130f 2005m y0engy01 b
101 0 $a eng
200 1 $a MEMS/MOEMS packaging $e concepts, designs, materials, and processes $f Ken Gilleo
210 $a New York $c McGraw-Hill $d c2005
215 0 $a xiii, 220 p $c ill $d 24 cm
225 M
320 $a Includes bibliographical references (p. 203-213) and index
606 $a Microelectronic packaging $3 417140 $2 lc $3 729750
606 $a Microelectromechanical systems $3 428971 $2 lc $3 725547
606 $a Optoelectronic devices $3 418320 $2 lc $3 728465
676 $a 621.381/046 $v 22
680 $a TK7870.15 $b G55 2005
700 $a Gilleo $b Ken $3 485186
801 0 $b DLC
801 0 $a cw $b BIB $c 20061121
801 1 $a cw $b 虎尾科技大學圖書館 $c 20061121

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