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Fundamentals of Semiconductor Manufa...

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May, Gary S

Fundamentals of Semiconductor Manufacturing and Process Control

Record Type:	Language materials, printed : monographic
Author:	MayGary S,
Secondary Intellectual Responsibility:	SpanosCostas J,
Place of Publication:	[Piscataway]
Published:	IEEE;
Year of Publication:	c2006
Description:	xix, 463 pill : 25 cm;
Subject:	Process control - Statistical methods -
Subject:	Integrated circuits - Design and construction -
Subject:	Semiconductors - Design and construction -
ISBN:	97804717840

Fundamentals of Semiconductor Manufacturing and Process Control
May, Gary S

Fundamentals of Semiconductor Manufacturing and Process Control / Gary S. May, Costas J. Spanos - [Piscataway] : IEEE, c2006. - xix, 463 p ; ill ; 25 cm.
Includes bibliographical references and index.
ISBN 97804717840ISBN 0471784060
Process controlIntegrated circuitsSemiconductors -- Statistical methods -- Design and construction -- Design and construction

Spanos, Costas J

Fundamentals of Semiconductor Manufacturing and Process Control
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200 1 $a Fundamentals of Semiconductor Manufacturing and Process Control $f Gary S. May, Costas J. Spanos
210 $a [Piscataway] $d c2006 $c IEEE
215 0 $a xix, 463 p $c ill $d 25 cm
320 $a Includes bibliographical references and index
606 $a Process control $x Statistical methods $3 411575 $2 lc $3 725489
606 $a Integrated circuits $x Design and construction $3 401386 $2 lc $3 727259
606 $a Semiconductors $x Design and construction $3 422820 $2 lc $3 728899
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801 1 $a cw $b 虎尾科技大學圖書館 $c 20070316

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