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Fundamentals of Semiconductor Manufa...
~
May, Gary S
Fundamentals of Semiconductor Manufacturing and Process Control
Record Type:
Language materials, printed : monographic
Author:
MayGary S,
Secondary Intellectual Responsibility:
SpanosCostas J,
Place of Publication:
[Piscataway]
Published:
IEEE;
Year of Publication:
c2006
Description:
xix, 463 pill : 25 cm;
Subject:
Process control - Statistical methods -
Subject:
Integrated circuits - Design and construction -
Subject:
Semiconductors - Design and construction -
ISBN:
97804717840
Fundamentals of Semiconductor Manufacturing and Process Control
May, Gary S
Fundamentals of Semiconductor Manufacturing and Process Control
/ Gary S. May, Costas J. Spanos - [Piscataway] : IEEE, c2006. - xix, 463 p ; ill ; 25 cm.
Includes bibliographical references and index.
ISBN 97804717840ISBN 0471784060
Process controlIntegrated circuitsSemiconductors -- Statistical methods -- Design and construction -- Design and construction
Spanos, Costas J
Fundamentals of Semiconductor Manufacturing and Process Control
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虎尾科技大學圖書館
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20070316
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