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Fundamentals of Semiconductor Manufa...

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May, Gary S

Fundamentals of Semiconductor Manufacturing and Process Control

紀錄類型:	書目-語言資料,印刷品 : 單行本
作者:	MayGary S,
其他作者:	SpanosCostas J,
出版地:	[Piscataway]
出版者:	IEEE;
出版年:	c2006
面頁冊數:	xix, 463 pill : 25 cm;
標題:	Process control - Statistical methods -
標題:	Integrated circuits - Design and construction -
標題:	Semiconductors - Design and construction -
ISBN:	97804717840

Fundamentals of Semiconductor Manufacturing and Process Control
May, Gary S

Fundamentals of Semiconductor Manufacturing and Process Control / Gary S. May, Costas J. Spanos - [Piscataway] : IEEE, c2006. - xix, 463 p ; ill ; 25 cm.
Includes bibliographical references and index.
ISBN 97804717840ISBN 0471784060
Process controlIntegrated circuitsSemiconductors -- Statistical methods -- Design and construction -- Design and construction

Spanos, Costas J

Fundamentals of Semiconductor Manufacturing and Process Control
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