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Enabling technology for MEMS and nan...

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Baltes, H

Enabling technology for MEMS and nanodevices

Record Type:	Language materials, printed : monographic
Secondary Intellectual Responsibility:	BaltesH,
Place of Publication:	Weinheim [Germany]
Published:	Wiley-VCH;
Year of Publication:	c2004
Description:	xii, 427 pill : 25 cm;
Series:
Subject:	Nanotechnology -
Subject:	Microelectronics -
Subject:	Microelectromechanical systems -
ISBN:	352730746X

Enabling technology for MEMS and nanodevices
Enabling technology for MEMS and nanodevices / edited by H. Baltes ... [et al.] - Weinheim [Germany] : Wiley-VCH, c2004. - xii, 427 p ; ill ; 25 cm. - ( ; v.1).
Includes bibliographical references and index.
ISBN 352730746X
NanotechnologyMicroelectronicsMicroelectromechanical systems

Baltes, H

Enabling technology for MEMS and nanodevices
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101 0 $a eng
200 1 $a Enabling technology for MEMS and nanodevices $f edited by H. Baltes ... [et al.]
210 $a Weinheim [Germany] $c Wiley-VCH $d c2004
215 0 $a xii, 427 p $c ill $d 25 cm
225 A $v v.1
320 $a Includes bibliographical references and index
606 $a Nanotechnology $3 420162 $2 lc $3 724362
606 $a Microelectronics $3 397607 $2 lc $3 725314
606 $a Microelectromechanical systems $3 428971 $2 lc $3 725547
676 $a 620.5 $v 22
702 $a Baltes $b H $3 447536
801 0 $b OHX
801 0 $a cw $b BIB $c 20070802
801 1 $a cw $b 虎尾科技大學圖書館 $c 20080910

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E027593

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620.5 E56 2004

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