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Dielectric films for advanced microe...

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Green, Martin

Dielectric films for advanced microelectronics

Record Type:	Language materials, printed : monographic
Secondary Intellectual Responsibility:	MaexKaren,
Secondary Intellectual Responsibility:	GreenMartin,
Secondary Intellectual Responsibility:	BaklanovMikhail,
Place of Publication:	Chichester, England
Published:	John Wiley & Sons;
Year of Publication:	c2007
Description:	xxii, 486 p.ill. : 26 cm.;
Series:	Wiley series in materials for electronic & optoelectronic applications
Subject:	Microelectronics - Materials -
Subject:	Dielectric films -
ISBN:	0470013605

Dielectric films for advanced microelectronics
Dielectric films for advanced microelectronics / edited by Mikhail Baklanov, Martin Green, and Karen Maex - Chichester, England : John Wiley & Sons, c2007. - xxii, 486 p. ; ill. ; 26 cm.. - (Wiley series in materials for electronic & optoelectronic applications ).
Includes bibliographical references and index.
ISBN 0470013605ISBN 9780470013601
MicroelectronicsDielectric films -- Materials

Maex, Karen

Dielectric films for advanced microelectronics
LDR:00961nam 2200277 i 450 001 500197
005 20101023201151.0
009 a(OCoLC)71581699
009 a(OCoLC)ocm71581699
009 a2006030740
010 1 $a 0470013605 $b (hbk.)
010 1 $a 9780470013601 $b (hbk.)
100 $a 20080130d2007 am0y0engy50020302ba
101 0 $a eng
102 $a gb
105 $a a z 001yy
200 1 $a Dielectric films for advanced microelectronics $f edited by Mikhail Baklanov, Martin Green, and Karen Maex
210 $a Chichester, England $d c2007 $c John Wiley & Sons
215 1 $a xxii, 486 p. $c ill. $d 26 cm.
225 2 $a Wiley series in materials for electronic & optoelectronic applications
320 $a Includes bibliographical references and index
410 0 $1 2001 $a Wiley series in materials for electronic & optoelectronic applications
606 $a Microelectronics $x Materials $3 416505 $2 lc $3 731023
606 $a Dielectric films $3 492847 $2 lc $3 731022
676 $a 621.381 $v 22
680 $a TK7871.15.F5 $b D54 2007
702 1 $a Maex $b Karen $3 492846
702 1 $a Green $b Martin $3 492845
702 1 $a Baklanov $b Mikhail $3 492844
801 0 $b DLC
801 0 $a tw $b BIB $c 20071119
801 2 $a tw $b NFU $c 20091105 $g CCR $m 3

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E029337

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621.381 D561 2007

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