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Dielectric films for advanced microe...

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Green, Martin

Dielectric films for advanced microelectronics

紀錄類型:	書目-語言資料,印刷品 : 單行本
其他作者:	MaexKaren,
其他作者:	GreenMartin,
其他作者:	BaklanovMikhail,
出版地:	Chichester, England
出版者:	John Wiley & Sons;
出版年:	c2007
面頁冊數:	xxii, 486 p.ill. : 26 cm.;
集叢名:	Wiley series in materials for electronic & optoelectronic applications
標題:	Microelectronics - Materials -
標題:	Dielectric films -
ISBN:	0470013605

Dielectric films for advanced microelectronics
Dielectric films for advanced microelectronics / edited by Mikhail Baklanov, Martin Green, and Karen Maex - Chichester, England : John Wiley & Sons, c2007. - xxii, 486 p. ; ill. ; 26 cm.. - (Wiley series in materials for electronic & optoelectronic applications ).
Includes bibliographical references and index.
ISBN 0470013605ISBN 9780470013601
MicroelectronicsDielectric films -- Materials

Maex, Karen

Dielectric films for advanced microelectronics
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200 1 $a Dielectric films for advanced microelectronics $f edited by Mikhail Baklanov, Martin Green, and Karen Maex
210 $a Chichester, England $d c2007 $c John Wiley & Sons
215 1 $a xxii, 486 p. $c ill. $d 26 cm.
225 2 $a Wiley series in materials for electronic & optoelectronic applications
320 $a Includes bibliographical references and index
410 0 $1 2001 $a Wiley series in materials for electronic & optoelectronic applications
606 $a Microelectronics $x Materials $3 416505 $2 lc $3 731023
606 $a Dielectric films $3 492847 $2 lc $3 731022
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702 1 $a Baklanov $b Mikhail $3 492844
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