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Fundamental principles of optical li...

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Mack, Chris A.

Fundamental principles of optical lithography : the science of microfabrication

紀錄類型:	書目-語言資料,印刷品 : 單行本
副題名:	the science of microfabrication
作者:	MackChris A.,
出版地:	Chichester, West Sussex, England
出版者:	Wiley;
出版年:	c2007.
面頁冊數:	xvii, 515 p.ill. : 25 cm.;
標題:	Microlithography - Industrial applications. -
標題:	Integrated circuits - Design and construction. -
附註:	Includes bibliographical references and index.
ISBN:	0470018933

Fundamental principles of optical lithography : the science of microfabrication
Mack, Chris A.

Fundamental principles of optical lithography : the science of microfabrication / Chris Mack. - Chichester, West Sussex, England : Wiley, c2007.. - xvii, 515 p. ; ill. ; 25 cm..
Includes bibliographical references and index..
ISBN 0470018933ISBN 9780470018934ISBN 0470727306ISBN 9780470727300
MicrolithographyIntegrated circuits -- Industrial applications. -- Design and construction.

Fundamental principles of optical lithography : the science of microfabrication
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215 1 $a xvii, 515 p. $c ill. $d 25 cm.
300 $a Includes bibliographical references and index.
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606 $2 lc $a Integrated circuits $x Design and construction. $3 550693
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