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Reactive Sputter Deposition

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Depla, Diederik.

Reactive Sputter Deposition

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Reactive Sputter Deposition/ edited by Diederik Depla, Stijn Mahieu.
other author:	Mahieu, Stijn.
Published:	Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg, : 2008.,
Description:	xviii, 570 p. :ill. (some col.), digital ; : 25 cm.;
Series:	Springer Series in Materials Science,
Contained By:	Springer eBooks
Subject:	Surfaces and Interfaces, Thin Films. -
Online resource:	http://www.springerlink.com/openurl.asp?genre=book&isbn=978-3-540-76664-3
ISBN:	9783540766643 (electronic bk.)

Reactive Sputter Deposition
Reactive Sputter Deposition[electronic resource] /edited by Diederik Depla, Stijn Mahieu. - Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg,2008. - xviii, 570 p. :ill. (some col.), digital ;25 cm. - Springer Series in Materials Science,1090933-033X ;.

ISBN: 9783540766643 (electronic bk.)Subjects--Topical Terms:

671207
Surfaces and Interfaces, Thin Films.

Dewey Class. No.: 621.38152

Reactive Sputter Deposition
LDR:00867nam a22002295a 4500 001 626945
003 Springer
005 20080805091502.0
006 m d
007 cr nn 008maaau
008 100108s2008 gw j eng d
020 $a 9783540766643 (electronic bk.)
020 $a 9783540766629 (paper)
035 $a 978-3-540-76662-9
082 0 4 $a 621.38152 $2 22
090 $a TK7871.88 $b .R281 2008
245 0 0 $a Reactive Sputter Deposition $h [electronic resource] / $c edited by Diederik Depla, Stijn Mahieu.
260 $a Berlin, Heidelberg : $c 2008. $b Springer-Verlag Berlin Heidelberg,
300 $a xviii, 570 p. : $b ill. (some col.), digital ; $c 25 cm.
440 0 $a Springer Series in Materials Science, $x 0933-033X ; $v 109
650 2 4 $a Surfaces and Interfaces, Thin Films. $3 671207
650 2 4 $a Physical Chemistry. $3 668972
650 2 4 $a Industrial Chemistry/Chemical Engineering. $3 671153
650 2 4 $a Condensed Matter. $3 671194
650 1 4 $a Chemistry. $3 593913
650 0 $a Thin films. $3 560219
650 0 $a Cathode sputtering (Plating process) $3 680889
700 1 $a Mahieu, Stijn. $3 680891
700 1 $a Depla, Diederik. $3 680890
710 2 $a SpringerLink (Online service) $3 593884
773 0 $t Springer eBooks
856 4 0 $u http://www.springerlink.com/openurl.asp?genre=book&isbn=978-3-540-76664-3
950 $a Chemistry and Materials Science (Springer-11644; ZDB-2-CMS)

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