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Reactive Sputter Deposition
~
Depla, Diederik.
Reactive Sputter Deposition
紀錄類型:
書目-語言資料,印刷品 : Monograph/item
正題名/作者:
Reactive Sputter Deposition/ edited by Diederik Depla, Stijn Mahieu.
其他作者:
Mahieu, Stijn.
出版者:
Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg, : 2008.,
面頁冊數:
xviii, 570 p. :ill. (some col.), digital ; : 25 cm.;
叢書名:
Springer Series in Materials Science,
Contained By:
Springer eBooks
標題:
Surfaces and Interfaces, Thin Films. -
電子資源:
http://www.springerlink.com/openurl.asp?genre=book&isbn=978-3-540-76664-3
ISBN:
9783540766643 (electronic bk.)
Reactive Sputter Deposition
Reactive Sputter Deposition
[electronic resource] /edited by Diederik Depla, Stijn Mahieu. - Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg,2008. - xviii, 570 p. :ill. (some col.), digital ;25 cm. - Springer Series in Materials Science,1090933-033X ;.
ISBN: 9783540766643 (electronic bk.)Subjects--Topical Terms:
671207
Surfaces and Interfaces, Thin Films.
Dewey Class. No.: 621.38152
Reactive Sputter Deposition
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