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Fundamentals of semiconductor manufa...
~
May, Gary S.
Fundamentals of semiconductor manufacturing and process control
紀錄類型:
書目-語言資料,印刷品 : Monograph/item
正題名/作者:
Fundamentals of semiconductor manufacturing and process control/ Gary S. May, Costas J. Spanos.
作者:
May, Gary S.
其他作者:
Spanos, Costas J.
出版者:
[Piscataway, N.J.] :IEEE ; : c2006.,
面頁冊數:
xix, 463 p. :ill. ; : 25 cm.;
標題:
Semiconductors - Design and construction. -
電子資源:
http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5201952
ISBN:
0471784060 (cloth : alk. paper)
Fundamentals of semiconductor manufacturing and process control
May, Gary S.
Fundamentals of semiconductor manufacturing and process control
[electronic resource] /Gary S. May, Costas J. Spanos. - [Piscataway, N.J.] :IEEE ;c2006. - xix, 463 p. :ill. ;25 cm.
Includes bibliographical references and index.
Introduction to semiconductor manufacturing -- Technology overview -- Process monitoring -- Statistical fundamentals -- Yield modeling -- Statistical process control -- Statistical experimental design -- Process modeling -- Advanced process control -- Process and equipment diagnosis.
ISBN: 0471784060 (cloth : alk. paper)
Standard No.: 10.1002/0471790281doiSubjects--Topical Terms:
599469
Semiconductors
--Design and construction.
LC Class. No.: TK7871.85 / .M379 2006
Dewey Class. No.: 621.3815/2
Fundamentals of semiconductor manufacturing and process control
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