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Micromechanics and MEMS = classic an...

Institute of Electrical and Electronics Engineers.

Micromechanics and MEMS = classic and seminal papers to 1990 /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Micromechanics and MEMS/ edited by William S. Trimmer.
其他題名:	classic and seminal papers to 1990 /
其他作者:	Trimmer, W.
出版者:	New York :IEEE Press, : 1997.,
面頁冊數:	1 online resource (xv, 701 p.) :ill. :
附註:	"A selected reprint volume."
標題:	Microelectronics. -
電子資源:	http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5273520
ISBN:	9780470545263

Micromechanics and MEMS = classic and seminal papers to 1990 /
Micromechanics and MEMSclassic and seminal papers to 1990 /[electronic resource] :edited by William S. Trimmer. - New York :IEEE Press,1997. - 1 online resource (xv, 701 p.) :ill.

"A selected reprint volume."

Includes bibliographical references and index.

Early papers in micromechanics -- Side drive actuators -- Comb drive actuators -- Electrostatic actuators -- Magnetic actuators -- Harmonic motors -- Other actuators : Thermal ; Shape memory alloy ; Impact ; Piezoelectric -- Values and pumps -- Fluidics -- Surface micromachining -- Bulk micromachining -- LIGA -- Computer aided design -- Metrology.

ISBN: 9780470545263

Source: 9780470545263IEEEhttp://ieeexplore.ieee.orgSubjects--Topical Terms:

554956
Microelectronics.
Index Terms--Genre/Form:

554714
Electronic books.

LC Class. No.: TK7874 / .M4876 1997

Dewey Class. No.: 621.381

Micromechanics and MEMS = classic and seminal papers to 1990 /
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245 0 0 $a Micromechanics and MEMS $h [electronic resource] : $b classic and seminal papers to 1990 / $c edited by William S. Trimmer.
260 $a New York : $b IEEE Press, $c 1997.
300 $a 1 online resource (xv, 701 p.) : $b ill.
500 $a "A selected reprint volume."
504 $a Includes bibliographical references and index.
505 0 $a Early papers in micromechanics -- Side drive actuators -- Comb drive actuators -- Electrostatic actuators -- Magnetic actuators -- Harmonic motors -- Other actuators : Thermal ; Shape memory alloy ; Impact ; Piezoelectric -- Values and pumps -- Fluidics -- Surface micromachining -- Bulk micromachining -- LIGA -- Computer aided design -- Metrology.
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