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Introduction to microfabrication /
~
Franssila, Sami.
Introduction to microfabrication /
Record Type:
Language materials, printed : Monograph/item
Title/Author:
Introduction to microfabrication // Sami Franssila.
Author:
Franssila, Sami.
Published:
Chichester, West Sussex, England ;John Wiley & Sons, : 2010. :,
Description:
xiv, 518 p. :ill. ; : 26 cm.;
Subject:
Nanotechnology. -
ISBN:
9780470749838 (cloth) :
Introduction to microfabrication /
Franssila, Sami.
Introduction to microfabrication /
Sami Franssila. - 2nd ed. - Chichester, West Sussex, England ;John Wiley & Sons,2010. : - xiv, 518 p. :ill. ;26 cm.
Includes bibliographical references and index.
ISBN: 9780470749838 (cloth) :NT2324
LCCN: 2010010076Subjects--Topical Terms:
557660
Nanotechnology.
LC Class. No.: TK7875 / .F73 2010
Dewey Class. No.: 621.381
Introduction to microfabrication /
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Introduction to microfabrication /
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2nd ed.
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Chichester, West Sussex, England ;
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Hoboken, NJ ,
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John Wiley & Sons,
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xiv, 518 p. :
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ill. ;
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26 cm.
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Includes bibliographical references and index.
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Nanotechnology.
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Electronic apparatus and appliances.
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Microelectromechanical systems.
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Microfabrication.
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639547
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圖書館3F 書庫
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