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CMOS cantilever sensor systems : = a...

Lange, D. (1970-)

CMOS cantilever sensor systems : = atomic force microscopy and gas sensing applications /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	CMOS cantilever sensor systems :/ D. Lange, O. Brand, H. Baltes.
其他題名:	atomic force microscopy and gas sensing applications /
作者:	Lange, D.
其他作者:	Baltes, H.
出版者:	Berlin ,Springer, : c2002. :,
面頁冊數:	viii, 142 p. :ill. ; : 25 cm.;
標題:	Gas detectors - Design and construction. -
電子資源:	http://www.loc.gov/catdir/enhancements/fy0817/2002067245-d.html
電子資源:	http://www.loc.gov/catdir/enhancements/fy0817/2002067245-t.html
ISBN:	3540431438 :

CMOS cantilever sensor systems : = atomic force microscopy and gas sensing applications /
Lange, D.1970-

CMOS cantilever sensor systems :atomic force microscopy and gas sensing applications /D. Lange, O. Brand, H. Baltes. - Berlin ,Springer,c2002. : - viii, 142 p. :ill. ;25 cm. - Microtechnology and MEMS.

Includes bibliographical references (p. [131]-140) and index.

ISBN: 3540431438 :NT4111

LCCN: 2002067245Subjects--Topical Terms:

775668
Gas detectors
--Design and construction.

LC Class. No.: TK7875 / .L36 2002

Dewey Class. No.: 681/.413

CMOS cantilever sensor systems : = atomic force microscopy and gas sensing applications /
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