| 紀錄類型: |
書目-語言資料,印刷品
: Monograph/item
|
| 正題名/作者: |
MEMS reliability/ by Allyson L. Hartzell, Mark G. da Silva, Herbert R. Shea. |
| 作者: |
Hartzell, Allyson L. |
| 其他作者: |
da Silva, Mark G. |
| 出版者: |
Boston, MA :Springer Science+Business Media, LLC, : 2011., |
| 面頁冊數: |
xiii, 291 p. :ill., digital ; : 24 cm.; |
| 叢書名: |
MEMS reference shelf, |
| Contained By: |
Springer eBooks |
| 標題: |
Microelectromechanical systems - Reliability. - |
| 電子資源: |
http://dx.doi.org/10.1007/978-1-4419-6018-4 |
| ISBN: |
9781441960184 (electronic bk.) |