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Extreme ultraviolet lithography /

~

Kumar, Ajay, (1962-.)

Extreme ultraviolet lithography /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Extreme ultraviolet lithography // [edited by] Banqiu Wu, Ajay Kumar.
other author:	Wu, Banqiu.
Published:	New York :McGraw-Hill, : c2009.,
Description:	xiv, 465 p. :ill. ; : 24 cm.;
Subject:	Extreme ultraviolet lithography. -
ISBN:	9780071549189 (Cloth) :

Extreme ultraviolet lithography /
Extreme ultraviolet lithography /[edited by] Banqiu Wu, Ajay Kumar. - New York :McGraw-Hill,c2009. - xiv, 465 p. :ill. ;24 cm.

Includes bibliographical references and index.

ISBN: 9780071549189 (Cloth) :NT3768

LCCN: 2009002187Subjects--Topical Terms:

795569
Extreme ultraviolet lithography.

LC Class. No.: TK7872.M3 / E987 2009

Dewey Class. No.: 621.3815/31

Extreme ultraviolet lithography /
LDR:00588cam a2200169 a 4500 001 682601
008 111125s2009 nyua b 001 0 eng
010 $a 2009002187
020 $a 9780071549189 (Cloth) : $c NT3768
020 $a 0071549188 (Cloth)
035 $a lc15598142
040 $a DLC $c DLC $d BTCTA $d BAKER $d YDXCP $d C $d CDX $d BWX $d DLC $c NFU
050 0 0 $a TK7872.M3 $b E987 2009
082 0 0 $a 621.3815/31 $2 22
245 0 0 $a Extreme ultraviolet lithography / $c [edited by] Banqiu Wu, Ajay Kumar.
260 $a New York : $c c2009. $b McGraw-Hill,
300 $a xiv, 465 p. : $b ill. ; $c 24 cm.
504 $a Includes bibliographical references and index.
650 0 $a Extreme ultraviolet lithography. $3 795569
650 0 $a Integrated circuits $x Masks. $3 564464
650 0 $a Integrated circuits $x Design and construction. $3 561265
700 1 $a Wu, Banqiu. $3 795567
700 1 $a Kumar, Ajay, $d 1962-. $3 795568

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E036577

圖書館3F 書庫

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一般圖書

621.381531 E96 2009

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1 records • Pages 1 •
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