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Fundamentals of microfabrication and...

Madou, Marc J.

Fundamentals of microfabrication and nanotechnology /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Fundamentals of microfabrication and nanotechnology // Marc J. Madou.
作者:	Madou, Marc J.
其他作者:	Madou, Marc J.
出版者:	Boca Raton, Fla. ;CRC Press, : c2012.:,
面頁冊數:	3 v. :ill. (some col.) ; : 29 cm.;
附註:	Rev. ed. of: Fundamentals of microfabrication. 2002.
標題:	Microelectronics. -
ISBN:	9780849331800 (set : cloth)

Fundamentals of microfabrication and nanotechnology /
Madou, Marc J.

Fundamentals of microfabrication and nanotechnology /Marc J. Madou. - 3rd ed. - Boca Raton, Fla. ;CRC Press,c2012.: - 3 v. :ill. (some col.) ;29 cm.

Rev. ed. of: Fundamentals of microfabrication. 2002.

Includes bibliographical references and index.

V. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications.

ISBN: 9780849331800 (set : cloth)

Nat. Bib. No.: GBA8E1445bnbSubjects--Topical Terms:

554956
Microelectronics.

LC Class. No.: TK7875 / .M33 2012

Dewey Class. No.: 621.38152

Fundamentals of microfabrication and nanotechnology /
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