國立虎尾科技大學 |

Fundamental principles of engineering nanometrology

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Fundamental principles of engineering nanometrology/ by Richard K. Leach.
Author:	Leach, R. K.
Published:	Oxford :William Andrew ; : c2010.,
Description:	1 online resource (xxvi, 321 p.) :ill. :
Subject:	Nanotechnology. -
Online resource:	http://www.sciencedirect.com/science/book/9780080964546
ISBN:	9780080964546

Fundamental principles of engineering nanometrology
Leach, R. K.

Fundamental principles of engineering nanometrology[electronic resource] /by Richard K. Leach. - 1st ed. - Oxford :William Andrew ;c2010. - 1 online resource (xxvi, 321 p.) :ill. - Micro and nano technologies. - Micro & nano technologies..

Includes bibliographical references and index.

Introduction to metrology for micro- and nanotechnology; Some basics of measurement;� Precision measurement instrumentation -- some design principles; Length traceability using interferometry; Displacement measurement; Surface topography measurement instrumentation; Scanning probe and particle beam microscopy; Surface topography characterisation; Co-ordinate metrology; Mass and force measurement; References; Appendix A: SI units of measurement and their realisation at NPL; Appendix B: SI derived units.

The principles of engineering metrology applied to the micro- and nanoscale: essential reading for all scientists and engineers involved in the commercialisation of nanotechnology and measurement processes requiring accuracy at the nanoscale. The establishment of common standards will be an essential key to unlocking the commercial potential of Micro- and Nanotechnologies (MNT), enabling fabrication plants to interchange parts, packaging and design rules. Effectively MNT standardization will provide the micro- and nanoscale equivalents of macro-scale nuts and bolts or house bricks. Currently there is a major thrust for standardization of MNT activities, with committees of the ISO, IEC and numerous national and regional committees being set up. In this book Professor Richard Leach, of the UK's National Physical Laboratory (NPL) makes a significant contribution to standardization in the field of MNT, extending the principles of engineering metrology to the micro- and nanoscale, with a focus on dimensional and mass metrology. The principles and techniques covered in this book form the essential toolkit for scientists and engineers involved in the commercialisation of nanotechnology and measurement processes requiring accuracy at the nanoscale. Key topics covered include: Basic metrological terminology, and the highly important topic of measurement uncertainty. Instrumentation, including an introduction to the laser Measurement of length using optical interferometry, including gauge block interferometry Displacement measurement and sensors Surface texture measurement, stylus, optical and scanning probe instruments, calibration, profile and areal characterisation Coordinate metrology Low mass and force metrology About the Author Professor Richard Leach is a Principal Research Scientist in the Mass & Dimensional Group, Engineering Measurement Division at the National Physical Laboratory (NPL), UK. Provides a basic introduction to measurement and instruments & nbsp; Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal, variable focus, and scattering instruments) Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties) Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge.

ISBN: 9780080964546

Source: 1048110:10482391Elsevier Science & Technologyhttp://www.sciencedirect.comSubjects--Topical Terms:

557660
Nanotechnology.
Index Terms--Genre/Form:

554714
Electronic books.

LC Class. No.: T174.7 / .L43 2010

Dewey Class. No.: 620.50287

Fundamental principles of engineering nanometrology
LDR:04655cam 2200433Ia 4500 001 691028
003 OCoLC
005 20111122085822.0
006 m d
007 cr cn|||||||||
008 120103s2010 enka ob 001 0 eng d
019 $a 353864796 $a 498135520 $a 551745710
020 $a 9780080964546
020 $a 0080964540
020 $a 1437778321 (electronic bk.)
020 $a 9781437778328 (electronic bk.)
029 1 $a AU@ $b 000044953857
029 1 $a AU@ $b 000045963968
035 $a (OCoLC)528581485 $z (OCoLC)353864796 $z (OCoLC)498135520 $z (OCoLC)551745710
035 $a ocn528581485
037 $a 1048110:10482391 $b Elsevier Science & Technology $n http://www.sciencedirect.com
040 $a OPELS $b eng $c OPELS $d YDXCP $d BTCTA $d OCLCQ $d N$T $d EBLCP $d IDEBK $d OCLCQ
049 $a TEFA
050 4 $a T174.7 $b .L43 2010
072 7 $a TEC $x 027000 $2 bisacsh
082 0 4 $a 620.50287 $2 22
100 1 $a Leach, R. K. $3 811620
245 1 0 $a Fundamental principles of engineering nanometrology $h [electronic resource] / $c by Richard K. Leach.
250 $a 1st ed.
260 $a Oxford : $a Amsterdam : $b William Andrew ; $c c2010. $b Elsevier Science,
300 $a 1 online resource (xxvi, 321 p.) : $b ill.
490 1 $a Micro and nano technologies
504 $a Includes bibliographical references and index.
505 0 $a Introduction to metrology for micro- and nanotechnology; Some basics of measurement;� Precision measurement instrumentation -- some design principles; Length traceability using interferometry; Displacement measurement; Surface topography measurement instrumentation; Scanning probe and particle beam microscopy; Surface topography characterisation; Co-ordinate metrology; Mass and force measurement; References; Appendix A: SI units of measurement and their realisation at NPL; Appendix B: SI derived units.
520 $a The principles of engineering metrology applied to the micro- and nanoscale: essential reading for all scientists and engineers involved in the commercialisation of nanotechnology and measurement processes requiring accuracy at the nanoscale. The establishment of common standards will be an essential key to unlocking the commercial potential of Micro- and Nanotechnologies (MNT), enabling fabrication plants to interchange parts, packaging and design rules. Effectively MNT standardization will provide the micro- and nanoscale equivalents of macro-scale nuts and bolts or house bricks. Currently there is a major thrust for standardization of MNT activities, with committees of the ISO, IEC and numerous national and regional committees being set up. In this book Professor Richard Leach, of the UK's National Physical Laboratory (NPL) makes a significant contribution to standardization in the field of MNT, extending the principles of engineering metrology to the micro- and nanoscale, with a focus on dimensional and mass metrology. The principles and techniques covered in this book form the essential toolkit for scientists and engineers involved in the commercialisation of nanotechnology and measurement processes requiring accuracy at the nanoscale. Key topics covered include: Basic metrological terminology, and the highly important topic of measurement uncertainty. Instrumentation, including an introduction to the laser Measurement of length using optical interferometry, including gauge block interferometry Displacement measurement and sensors Surface texture measurement, stylus, optical and scanning probe instruments, calibration, profile and areal characterisation Coordinate metrology Low mass and force metrology About the Author Professor Richard Leach is a Principal Research Scientist in the Mass & Dimensional Group, Engineering Measurement Division at the National Physical Laboratory (NPL), UK. Provides a basic introduction to measurement and instruments & nbsp; Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal, variable focus, and scattering instruments) Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties) Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge.
588 $a Description based on print version record.
650 0 $a Nanotechnology. $3 557660
650 0 $a Microtechnology. $3 671338
650 0 $a Metrology. $3 786241
650 7 $a TECHNOLOGY & ENGINEERING $x Nanotechnology & MEMS. $2 bisacsh $3 811621
655 4 $a Electronic books. $2 local $3 554714
830 0 $a Micro & nano technologies. $3 595748
856 4 0 $3 ScienceDirect $u http://www.sciencedirect.com/science/book/9780080964546
938 $a YBP Library Services $b YANK $n 3037516
938 $a Baker and Taylor $b BTCP $n BK0008395852
938 $a EBL - Ebook Library $b EBLB $n EBL477418
994 $a C0 $b TEF